Improvement of light extraction for a target wavelength in InGaN/GaN LEDs with an indium tin oxide dual layer by oblique angle deposition

2016 ◽  
Vol 9 (8) ◽  
pp. 082103 ◽  
Author(s):  
Dong-Ju Seo ◽  
Dong-Seon Lee
2008 ◽  
Vol 23 (9) ◽  
pp. 2500-2505 ◽  
Author(s):  
Y. Zhong ◽  
Y.C. Shin ◽  
C.M. Kim ◽  
B.G. Lee ◽  
E.H. Kim ◽  
...  

The optical and electrical properties of “tilted” and “spiral” indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.


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Manuel Oliva-Ramírez ◽  
Dong Wang ◽  
Dominik Flock ◽  
Víctor Rico ◽  
Agustín R. González-Elipe ◽  
...  

2011 ◽  
Vol 520 (4) ◽  
pp. 1233-1237 ◽  
Author(s):  
S. Flickyngerová ◽  
M. Netrvalová ◽  
P. Šutta ◽  
I. Novotný ◽  
V. Tvarožek ◽  
...  

2013 ◽  
Vol 121 (1416) ◽  
pp. 710-713
Author(s):  
Shunsuke MURAI ◽  
Tomohiko MATOBA ◽  
Christopher T. NELSON ◽  
Takuya KOMINE ◽  
Koji FUJITA ◽  
...  

2021 ◽  
pp. 161265
Author(s):  
Rattanachai Kowong ◽  
Somyod Denchitcharoen ◽  
Tossaporn Lertvanithphol ◽  
Narit Triamnak ◽  
Chanunthorn Chananonnawathorn ◽  
...  

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