Temperature Measurement of Si Substrate Using Optical-Fiber-Type Low-Coherence Interferometry Employing Supercontinuum Light
2013 ◽
Vol 52
(2R)
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pp. 026602
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Keyword(s):
2004 ◽
Vol 43
(11A)
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pp. 7737-7741
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Keyword(s):
2014 ◽
Vol 54
(1S)
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pp. 01AB03
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