Determination of Current Density Suppression Ability of Poly(ethylene glycol) during Copper Electrodeposition by an Electrochemical Analysis with a Microfluidic Device and an Electrochemical Quartz Crystal Microbalance
2014 ◽
Vol 53
(5S2)
◽
pp. 05GA05
◽
2009 ◽
Vol 113
(11)
◽
pp. 3365-3369
◽
2007 ◽
Vol 315
(2)
◽
pp. 800-804
◽
Keyword(s):
2017 ◽
Vol 62
(9)
◽
pp. 2755-2760
◽
Keyword(s):