Structural, mechanical, and electrical properties of cubic boron nitride thin films deposited by magnetically enhanced plasma ion plating method

2014 ◽  
Vol 53 (3S2) ◽  
pp. 03DB02 ◽  
Author(s):  
Masao Noma ◽  
Koji Eriguchi ◽  
Yoshinori Takao ◽  
Nobuyuki Terayama ◽  
Kouichi Ono
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Ion Plating ◽  
Mechanical And Electrical Properties ◽  
Plating Method

Electrical properties of sulfur-implanted cubic boron nitride thin films

2014 ◽  
Vol 59 (12) ◽  
pp. 1280-1284 ◽  
Author(s):  
Xingwang Zhang ◽  
Zhigang Yin ◽  
Faitong Si ◽  
Hongli Gao ◽  
Xin Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Boron Nitride ◽  
Cubic Boron Nitride

X-RAY SPECTROSCOPIC ANALYSIS OF BORON-NITRIDE CLUSTERS DEPOSITED BY ION-PLATING METHOD

1996 ◽  
Vol 03 (01) ◽  
pp. 1051-1057 ◽  
Author(s):  
H. KOHZUKI ◽  
M. MOTOYAMA ◽  
T. KANEYOSHI ◽  
Y. KOWADA ◽  
J. KAWAI ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Emission Spectrum ◽  
Cubic Boron Nitride ◽  
Emission Spectra ◽  
Satellite Peak ◽  
X Ray ◽  
Ion Plating ◽  
Hartree Fock ◽  
Plating Method ◽  
Diffraction Patterns

Cubic boron-nitride (c-BN) films were deposited on a silicon substrate by varying the deposition time, using a reactive ion-plating method. In order to investigate the growth mechanism of c-BN films, these c-BN films were characterized by x-ray emission spectra of boron (B K x-ray emission spectra), infrared absorption spectra, selected area diffraction patterns, and TEM microstructures. It was found that the BN film with sp2 bonding formed initially on the substrate and subsequently c-BN film formed. The c-BN film was composed of fine crystallites with a size of about 10 nm and with random orientation. In the case of the B K x-ray emission spectrum from the BN film with sp 2 bonding, the intensity of the satellite peak at the short-wavelength side was extremely stronger than that of sp 2-bonded BN-like turbostratic or hexagonal BN. As a result of calculation of the B K x-ray emission spectrum of BN using the discrete variational Hartree-Fock-Slater (DV-Xα) method, it was found that the satellite peak intensity increased with formation of the fine BN cluster having two-coordinated boron (which has a dangling bond) and with decreasing size of the cluster. Therefore, it is considered that the BN film with sp 2 bonding was composed of the very fine BN cluster having two-coordinated borons, and became the precursor of c-BN film at the interface between the substrate and c-BN film.

Growth and electrical properties of ZnO thin films deposited by novel ion plating method

2003 ◽  
Vol 445 (2) ◽  
pp. 274-277 ◽  
Author(s):  
K. Iwata ◽  
T. Sakemi ◽  
A. Yamada ◽  
P. Fons ◽  
K. Awai ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Zno Thin Films ◽  
Ion Plating ◽  
Plating Method

Electron optical characterization of cubic boron nitride thin films prepared by reactive ion plating

1991 ◽  
Vol 70 (6) ◽  
pp. 3007-3012 ◽  
Author(s):  
D. R. McKenzie ◽  
D. J. H. Cockayne ◽  
D. A. Muller ◽  
M. Murakawa ◽  
S. Miyake ◽  
...  
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Optical Characterization ◽  
Ion Plating

The electrical properties of sulfur-implanted cubic boron nitride thin films

2012 ◽  
Vol 21 (4) ◽  
pp. 047202 ◽  
Author(s):  
Jin-Xiang Deng ◽  
Yang Qin ◽  
Le Kong ◽  
Xue-Liang Yang ◽  
Ting Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Boron Nitride ◽  
Cubic Boron Nitride
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