scholarly journals Properties of Amorphous Carbon Films Synthesized by Atmospheric Pressure Glow Plasma CVD Method

2006 ◽  
Vol 19 (5) ◽  
pp. 673-678 ◽  
Author(s):  
Hideyuki Kodama ◽  
Satoshi Iizumi ◽  
Masayuki Nakaya ◽  
Akira Shirakura ◽  
Atsushi Morita ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Cvd Method ◽  
Atmospheric Pressure Glow Plasma ◽  
Glow Plasma

scholarly journals Deposition of amorphous-carbon films by RF plasma CVD method.

1991 ◽  
Vol 17 (2) ◽  
pp. 305-312
Author(s):  
Tohru Mitomo ◽  
Tomohiro Ohta ◽  
Hiroaki Sasaki ◽  
Kenichi Ohtsuka ◽  
Yasuhiro Habu
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Rf Plasma ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Cvd Method

Electronic properties of ion irradiated amorphous carbon films prepared by plasma assisted CVD method

Vacuum ◽  
1996 ◽  
Vol 47 (11) ◽  
pp. 1285-1288 ◽  
Author(s):  
S Bhattacharyya ◽  
D Kanjilal ◽  
A Sayeed ◽  
V Meenakshi ◽  
SV Subramanyam
Keyword(s):  
Electronic Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Cvd Method
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