Prediction of low-energy boron doping profile for ultrashallow junction formation by hybrid molecular dynamics method

2015 ◽  
Vol 55 (1) ◽  
pp. 016503
Author(s):  
Hidehiko Yabuhara ◽  
Akira Miyamoto
2000 ◽  
Vol 20 (1Supplement) ◽  
pp. 43-46
Author(s):  
Ken-ichi SAITOH ◽  
Takashi DOI ◽  
Masao KOMAYA ◽  
Takehiko INABA

2015 ◽  
Vol 119 (46) ◽  
pp. 14594-14603 ◽  
Author(s):  
Ole Juul Andersen ◽  
Julie Grouleff ◽  
Perri Needham ◽  
Ross C. Walker ◽  
Frank Jensen

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