ultrashallow junction
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scholarly journals Ultrashallow Junction Electrodes in Low-Loss Silicon Microring Resonators

2021 ◽  
Vol 15 (4) ◽  
Author(s):  
Bin-Bin Xu ◽  
Gabriele G. de Boo ◽  
Brett C. Johnson ◽  
Miloš Rančić ◽  
Alvaro Casas Bedoya ◽  
...  
Keyword(s):  
Microring Resonators ◽  
Low Loss ◽  
Ultrashallow Junction

scholarly journals Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation.

2019 ◽  
Vol 23 (1) ◽  
pp. 19-27
Author(s):  
Cleber Biasotto ◽  
Viktor Gonda ◽  
Lis K. Nanver ◽  
J. Van der Cingel ◽  
V. Jovanović
Keyword(s):  
Laser Annealing ◽  
Junction Formation ◽  
Ultrashallow Junction

Electrical and Optical Performance Investigation of Si-Based Ultrashallow-Junction $\hbox{p}^{+}\hbox{-}\hbox{n}$ VUV/EUV Photodiodes

2012 ◽  
Vol 61 (5) ◽  
pp. 1268-1277 ◽  
Author(s):  
Lei Shi ◽  
Stoyan Nihtianov ◽  
Sha Xia ◽  
Lis K. Nanver ◽  
Alexander Gottwald ◽  
...  
Keyword(s):  
Optical Performance ◽  
Ultrashallow Junction
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