Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry

2004 ◽  
Author(s):  
Syozo Takada ◽  
Nobuhiro Hata ◽  
Yutaka Seino ◽  
Nobutoshi Fujii ◽  
Takamaro Kikkawa
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Microstructure Characterization ◽  
Infrared Spectroscopic ◽  
Low K

Combined characterization of conductive materials by infrared spectroscopic ellipsometry and grazing X-ray reflectance

1998 ◽  
Vol 319 (1-2) ◽  
pp. 67-72 ◽  
Author(s):  
Pierre Boher ◽  
Michel Luttmann ◽  
Jean Louis Stehle ◽  
Louis Hennet
Keyword(s):  
Spectroscopic Ellipsometry ◽  
X Ray ◽  
Conductive Materials ◽  
Infrared Spectroscopic

scholarly journals Characterization of porous low-k films using variable angle spectroscopic ellipsometry

2006 ◽  
Vol 99 (8) ◽  
pp. 083503 ◽  
Author(s):  
M. T. Othman ◽  
J. A. Lubguban ◽  
A. A. Lubguban ◽  
S. Gangopadhyay ◽  
R. D. Miller ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Variable Angle ◽  
Variable Angle Spectroscopic Ellipsometry ◽  
Low K

scholarly journals Simultaneous characterization of physical, chemical, and thermal properties of polymeric multilayers using infrared spectroscopic ellipsometry

2018 ◽  
Vol 553 ◽  
pp. 155-168 ◽  
Author(s):  
David A. Castilla-Casadiego ◽  
Luis Pinzon-Herrera ◽  
Maritza Perez-Perez ◽  
Beatriz A. Quiñones-Colón ◽  
David Suleiman ◽  
...  
Keyword(s):  
Thermal Properties ◽  
Spectroscopic Ellipsometry ◽  
Physical Chemical ◽  
Infrared Spectroscopic

Low-k dielectrics: a non-destructive characterization by infrared spectroscopic ellipsometry

2003 ◽  
Vol 70 (2-4) ◽  
pp. 320-329 ◽  
Author(s):  
P. Boher ◽  
C. Defranoux ◽  
M. Bucchia ◽  
C. Guillotin
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Infrared Spectroscopic ◽  
Non Destructive ◽  
Low K ◽  
Non Destructive Characterization

Infrared spectroscopic ellipsometry applied to the characterization of ultra shallow junction on silicon and SOI

2004 ◽  
Vol 455-456 ◽  
pp. 150-156 ◽  
Author(s):  
C. Defranoux ◽  
T. Emeraud ◽  
S. Bourtault ◽  
J. Venturini ◽  
P. Boher ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Shallow Junction ◽  
Infrared Spectroscopic

Infrared spectroscopic ellipsometry applied to the characterization of nano-structures of silicon IC manufacturing

2004 ◽  
Vol 450 (1) ◽  
pp. 173-177 ◽  
Author(s):  
P Boher ◽  
M Bucchia ◽  
C Guillotin ◽  
C Defranoux
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Nano Structures ◽  
Ic Manufacturing ◽  
Infrared Spectroscopic
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