In Situ Si Wafer Surface Temperature Measurement during Flash Lamp Annealing

2009 ◽  
Author(s):  
Y. Yamada ◽  
T. Aoyama ◽  
H. Chino ◽  
K. Hiraka ◽  
J. Ishii ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Temperature Measurement ◽  
Flash Lamp ◽  
Wafer Surface ◽  
Surface Temperature Measurement ◽  
Si Wafer

In situSi Wafer Surface Temperature Measurement during Flash Lamp Annealing

2010 ◽  
Vol 49 (4) ◽  
pp. 04DA20 ◽  
Author(s):  
Yoshiro Yamada ◽  
Takayuki Aoyama ◽  
Hajime Chino ◽  
Kensuke Hiraka ◽  
Juntaro Ishii ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Temperature Measurement ◽  
Flash Lamp ◽  
Wafer Surface ◽  
Surface Temperature Measurement

In Situ Surface Temperature Measurement in a Conveyor Belt Furnace via Inline Infrared Thermography

10.3791/60963 ◽  
2020 ◽  
Author(s):  
Daniel Ourinson ◽  
Gernot Emanuel ◽  
Gunnar Dammaß ◽  
Harald Müller ◽  
Florian Clement ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Temperature Measurement ◽  
Infrared Thermography ◽  
Conveyor Belt ◽  
Surface Temperature Measurement
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