The XPS Study on Depth Profile of N Atom in Oxynitride Film Formed on 4H-SiC by Radical Nitridation
1981 ◽
Vol 16
(1)
◽
pp. 73-76
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1981 ◽
Vol 42
(7)
◽
pp. 1025-1028
◽
2015 ◽
Vol 60
(6)
◽
pp. 511-520
◽
Keyword(s):
2004 ◽
Vol 36
(8)
◽
pp. 1199-1202
◽