A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

Silicon oxynitride (SiNxOy) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and discusses the preparation methods, performance, and applications of SiNxOy film. In particular, the preparation of SiNxOy film by chemical vapor deposition, physical vapor deposition, and oxynitridation is elaborated in details.

Effect of oxidation of nitride coatings on corrosion properties of Ti-6Al-4V alloy in 0.9% NaCl at 40°C

The corrosion properties of Ti-6Al-4V alloy with oxidized thermodiffusion nitride coatings were investigated in isotonic 0.9% solution of NaCl at temperature of 40°C. It was shown that modification of nitride coatings by oxygen leads to a deterioration of the protective properties of nitrided surface of Ti-6Al-4V alloy. The protective properties of the alloy with nitride coatings modified by oxygen are determined by the composition of formed surface oxynitride film.