Development of an Optical Position Sensor for High-Precision Electromagnetic Force Compensation Balance

2021 ◽  
Vol 38 (8) ◽  
pp. 567-574
Author(s):  
Jeong-Hyun Bae ◽  
Kyung-Taek Yoon ◽  
Hyun-Ho Lim ◽  
Young-Man Choi
Keyword(s):  
High Precision ◽  
Electromagnetic Force ◽  
Position Sensor ◽  
Optical Position ◽  
Force Compensation

A High-Precision Absolute Angular Position Sensor With Vernier Capacitive Arrays Based on Time Grating

2019 ◽  
Vol 19 (19) ◽  
pp. 8626-8634 ◽  
Author(s):  
Hongji Pu ◽  
Hewen Wang ◽  
Xiaokang Liu ◽  
Zhicheng Yu ◽  
Kai Peng
Keyword(s):  
High Precision ◽  
Angular Position ◽  
Position Sensor

A Glass Slab Optical Waveguide Detector with an Optical Position Sensor for Flow Analysis

1995 ◽  
Vol 24 (10) ◽  
pp. 933-934 ◽  
Author(s):  
Kin-ichi Tsunoda ◽  
Hiroko Ueno ◽  
Hideo Akaiwa
Keyword(s):  
Optical Waveguide ◽  
Flow Analysis ◽  
Position Sensor ◽  
Optical Position ◽  
Glass Slab

A Fast CMOS Optical Position Sensor With High Subpixel Resolution

2004 ◽  
Vol 53 (1) ◽  
pp. 116-123 ◽  
Author(s):  
N. Massari ◽  
L. Gonzo ◽  
M. Gottardi ◽  
A. Simoni
Keyword(s):  
Position Sensor ◽  
Optical Position ◽  
Subpixel Resolution

scholarly journals A fast high-precision six-degree-of-freedom relative position sensor

2016 ◽  
Author(s):  
Gary B. Hughes ◽  
Van P. Macasaet ◽  
Janelle Griswold ◽  
Claudia A. Sison ◽  
Philip Lubin ◽  
...  
Keyword(s):  
High Precision ◽  
Relative Position ◽  
Degree Of Freedom ◽  
Position Sensor ◽  
Six Degree Of Freedom

High-precision fiber-optic position sensor system using ladar techniques

1991 ◽  
Author(s):  
Edward J. Vertatschitsch ◽  
Gregory L. Abbas ◽  
Michael de La Chapelle ◽  
Charles R. Porter
Keyword(s):  
High Precision ◽  
Fiber Optic ◽  
Sensor System ◽  
Position Sensor

Precision-Limit Positioning of a Linear Motor Nano Drive System

2006 ◽  
Vol 505-507 ◽  
pp. 1243-1248
Author(s):  
Chen Hsieh ◽  
Ji-Lung Lin ◽  
Jen Chiou Huang ◽  
Chih Hong Chen
Keyword(s):  
High Precision ◽  
Feedback Loop ◽  
Linear Motor ◽  
Position Sensor ◽  
Operational Cost ◽  
Precision Positioning ◽  
Position Resolution ◽  
Precision Limit ◽  
Standard Linear ◽  
Modern Manufacturing

Ultra high precision positioning is an important issue in modern manufacturing industries. As it comes to positioning it is widely believed that friction is detrimental to high precision. As a result, people usually use special mechanical systems such as air-bearing guides and/or hybrid drives in a high precision positioning system to avoid the influence of friction. These strategies, however, increase the operational cost and system complexity. In this paper, it describes how to apply the Precision-Limit Positioning (PLP) technique introduced in [1] to a standard linear motor system with the existence of friction. The position resolution is designed to equal to the resolution of the position sensor used in the feedback loop, which is 2nm/count. It is further requested that the repeatability and steady state vibration of the system are stable enough so that the table is capable of doing count-by-count operation.

Sign in / Sign up

Export Citation Format

Share Document