scholarly journals On-line Monitoring of Surface Roughness with a Laser Light Scattering Method and Its Application to Inspections

Author(s):  
Takeaki YOSHIMURA ◽  
Minniu ZHOU
Author(s):  
Richard Chiou ◽  
Michael Mauk ◽  
Bret Davis

This paper discusses the design and implementation of a remote non-contact solar cell surface roughness monitoring system as well as resulting data in solar energy manufacturing. The process solution set represents an integrated suite that provides solar cell manufacturing process monitoring, tool and fixture design, visualization, quality analysis, and automation through a remote robotic control system. An experimental study of surface roughness effect on laser light scattering from textured surfaces is described. The results and the system proposed are useful in implementing laser light scattering instruments for on-line monitoring of solar cell manufacturing processes which produce surface roughness patterns.


2001 ◽  
Vol 101 (3) ◽  
pp. 109-118 ◽  
Author(s):  
Ichiro Kajiwara ◽  
Hisao Ogawa ◽  
Hirofumi Soejima ◽  
Keiji Takazoe ◽  
Shinzo Miyamoto ◽  
...  

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