Abstract
Studied are the films of variously doped polycrystalline n-semiconductors (ZnO, SnO2) as selective sensitive elements (SE) of chemical sensors for various gases and vapours (ammonia, acetone, propane, ethanol, hexane, solvent, turpentine etc.) in artificial air. It has been revealed that their conductivity changes under temperature modulation makes possible data processing which identifies the impurities above. This processing is based on nonlinear regression estimation of so called principal parameters which set is unique for every concentration of every of the gases/vapours.