photocarrier radiometry
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Differential nonlinear photocarrier radiometry for the characterization of ultra-low energy boron implantation in Silicon

2021 ◽  
Author(s):  
Xiaoke Lei ◽  
Bincheng Li ◽  
Qiming Sun ◽  
Jing Wang ◽  
Chunming Gao ◽  
...  
Keyword(s):  
Low Energy ◽  
Photocarrier Radiometry ◽  
Boron Implantation

scholarly journals Determination of doping concentration of heavily doped silicon wafers using photon reabsorption in photocarrier radiometry

AIP Advances ◽  
2020 ◽  
Vol 10 (3) ◽  
pp. 035118
Author(s):  
Qian Wang ◽  
Weiguo Liu ◽  
Lei Gong ◽  
Liguo Wang ◽  
Yaqing Li
Keyword(s):  
Doping Concentration ◽  
Silicon Wafers ◽  
Photocarrier Radiometry ◽  
Doped Silicon ◽  
Heavily Doped

Electronic transport characterization of B+ ion-implanted silicon wafers with nonlinear photocarrier radiometry

2020 ◽  
Vol 127 (3) ◽  
pp. 035701 ◽  
Author(s):  
Xiaoke Lei ◽  
Bincheng Li ◽  
Qiming Sun ◽  
Jing Wang ◽  
Chunming Gao
Keyword(s):  
Electronic Transport ◽  
Silicon Wafers ◽  
Photocarrier Radiometry ◽  
Ion Implanted

scholarly journals Nonlinear two-layer model for photocarrier radiometry of ion-implanted silicon wafers

AIP Advances ◽  
2019 ◽  
Vol 9 (3) ◽  
pp. 035125 ◽  
Author(s):  
Xiaoke Lei ◽  
Bincheng Li ◽  
Qiming Sun ◽  
Jing Wang ◽  
Chunming Gao
Keyword(s):  
Silicon Wafers ◽  
Photocarrier Radiometry ◽  
Layer Model ◽  
Two Layer Model ◽  
Ion Implanted
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