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Evolution of microstructure of IGZO ceramic target during magnetron sputtering

2021 ◽  
Author(s):  
Shuhan Liu ◽  
Jie Chen ◽  
Benshuang Sun ◽  
Zhiyuan Huai ◽  
Fudi Xiong ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Ceramic Target ◽  
Evolution Of Microstructure

On the effect of ceramic target composition on coatings deposited by electron-beam evaporation at forevacuum pressure

2020 ◽  
Vol 46 (17) ◽  
pp. 27641-27646
Author(s):  
Yu. G. Yushkov ◽  
E.M. Oks ◽  
K.V. Oskomov ◽  
A.V. Tyunkov ◽  
E.V. Yakovlev ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Ceramic Target ◽  
Target Composition

scholarly journals Effect of RF sputtering power and vacuum annealing on the properties of AZO thin films prepared from ceramic target in confocal configuration

2020 ◽  
Vol 118 ◽  
pp. 105217 ◽  
Author(s):  
Fatiha Challali ◽  
Djelloul Mendil ◽  
Tahar Touam ◽  
Thierry Chauveau ◽  
Valérie Bockelée ◽  
...  
Keyword(s):  
Thin Films ◽  
Vacuum Annealing ◽  
Rf Sputtering ◽  
Ceramic Target ◽  
Sputtering Power

scholarly journals Quantitative SEM characterisation of ceramic target prior and after magnetron sputtering: a case study of aluminium zinc oxide

2020 ◽  
Author(s):  
ALI REZA JAHANGIRI ◽  
PAYAM RAJABI KALVANI ◽  
SAMANEH SHAPOURI ◽  
AMIRHOSSEIN SARI ◽  
ŞTEFAN ŢĂLU ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Ceramic Target

Effect of working gas on the electron-beam heating of a ceramic target in the fore-vacuum pressure range

Vacuum ◽  
2020 ◽  
Vol 179 ◽  
pp. 109500
Author(s):  
D.B. Zolotukhin ◽  
E.M. Oks ◽  
A.V. Tyunkov ◽  
Yu.G. Yushkov ◽  
A.A. Zenin
Keyword(s):  
Electron Beam ◽  
Pressure Range ◽  
Vacuum Pressure ◽  
Ceramic Target ◽  
Beam Heating ◽  
Electron Beam Heating

An investigation of the ballistic performance of independent ceramic target

2020 ◽  
Vol 154 ◽  
pp. 106784 ◽  
Author(s):  
M.K. Khan ◽  
M.A. Iqbal ◽  
V. Bratov ◽  
N.F. Morozov ◽  
N.K. Gupta
Keyword(s):  
Ballistic Performance ◽  
Ceramic Target

Different stages of electron-beam evaporation of ceramic target in medium vacuum

2020 ◽  
Vol 127 (11) ◽  
pp. 113303 ◽  
Author(s):  
Yury G. Yushkov ◽  
Denis B. Zolotukhin ◽  
Efim M. Oks ◽  
Andrey V. Tyunkov
Keyword(s):  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Ceramic Target ◽  
Medium Vacuum
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