silicon epitaxy
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scholarly journals Transmission electron microscopy characterization of low temperature boron doped silicon epitaxial films

CrystEngComm ◽  
2020 ◽  
Vol 22 (33) ◽  
pp. 5464-5472
Author(s):  
Guillaume Noircler ◽  
Marta Chrostowski ◽  
Melvyn Larranaga ◽  
Etienne Drahi ◽  
Pere Roca i Cabarrocas ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Low Temperature ◽  
Thickness Measurement ◽  
Field Analysis ◽  
Silicon Epitaxy ◽  
Transmission Electron ◽  
Transmission Electron Microscopy Characterization ◽  
Microscopy Characterization ◽  
Microscopy Techniques

Transmission electron microscopy techniques to better understand growth mechanisms and annealing of low temperature silicon epitaxy. HRTEM: thickness measurement, crystal morphology, and defect study. GPA (image processing): strain field analysis.

A Density Functional Theory Study of Chlorosilanes Polymerization in Silicon Epitaxy

2019 ◽  
Vol 25 (8) ◽  
pp. 33-40
Author(s):  
Davide Moscatelli ◽  
Marco Dossi ◽  
Alessandro Fiorucci ◽  
Maurizio Masi
Keyword(s):  
Density Functional Theory ◽  
Density Functional ◽  
Density Functional Theory Study ◽  
Functional Theory ◽  
Silicon Epitaxy

Monochlorosilane for Low Temperature Silicon Epitaxy

2019 ◽  
Vol 33 (6) ◽  
pp. 155-164
Author(s):  
Pierre Tomasini ◽  
Keith D. Weeks
Keyword(s):  
Low Temperature ◽  
Silicon Epitaxy

scholarly journals Low-Temperature Silicon Epitaxy for Atomic Precision Devices

2019 ◽  
Vol 93 (1) ◽  
pp. 37-40
Author(s):  
Evan M Anderson ◽  
Aaron M Katzenmeyer ◽  
Ting S Luk ◽  
DeAnna M Campbell ◽  
Michael T Marshall ◽  
...  
Keyword(s):  
Low Temperature ◽  
Silicon Epitaxy ◽  
Atomic Precision

Optimization of deposition uniformity during silicon epitaxy in deep trenches

2019 ◽  
Vol 34 (2) ◽  
pp. 024001 ◽  
Author(s):  
Alexander Segal ◽  
Eugene Yakovlev ◽  
Denis Bazarevskiy ◽  
Roman Talalaev ◽  
Hocine Ziad ◽  
...  
Keyword(s):  
Silicon Epitaxy ◽  
Deposition Uniformity

Silicon epitaxy process recipe and tool configuration optimization

2017 ◽  
Author(s):  
W. H. Moy ◽  
K. Y. Cheong
Keyword(s):  
Configuration Optimization ◽  
Silicon Epitaxy

scholarly journals Silicon epitaxy on H-terminated Si (100) surfaces at 250 °C

2016 ◽  
Vol 378 ◽  
pp. 301-307 ◽  
Author(s):  
Xiao Deng ◽  
Pradeep Namboodiri ◽  
Kai Li ◽  
Xiqiao Wang ◽  
Gheorghe Stan ◽  
...  
Keyword(s):  
Silicon Epitaxy

Silicon epitaxy using tetrasilane at low temperatures in ultra-high vacuum chemical vapor deposition

2016 ◽  
Vol 444 ◽  
pp. 21-27 ◽  
Author(s):  
Ramsey Hazbun ◽  
John Hart ◽  
Ryan Hickey ◽  
Ayana Ghosh ◽  
Nalin Fernando ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Low Temperatures ◽  
High Vacuum ◽  
Chemical Vapor ◽  
Ultra High Vacuum ◽  
Silicon Epitaxy

scholarly journals In situ annealing and high-rate silicon epitaxy on porous silicon by mesoplasma process

2016 ◽  
Vol 9 (5) ◽  
pp. 055506 ◽  
Author(s):  
Sheng Zhang ◽  
Ziyu Lu ◽  
Jiang Sheng ◽  
Pingqi Gao ◽  
Xi Yang ◽  
...  
Keyword(s):  
Porous Silicon ◽  
High Rate ◽  
Silicon Epitaxy

Silicon epitaxy by low-temperature RF-PECVD using SiF4/H2/Ar gas mixtures for emitter formation in crystalline solar cells

2015 ◽  
Author(s):  
Ronan Leal ◽  
Jean-Christophe Dornstetter ◽  
Farah Haddad ◽  
Gilles Poulain ◽  
Jean-Luc Maurice ◽  
...  
Keyword(s):  
Solar Cells ◽  
Low Temperature ◽  
Gas Mixtures ◽  
Silicon Epitaxy ◽  
Ar Gas
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