An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS

The traditional microscopic speckle interferometer has limited applications in engineering due to its small field of view. In this paper, we propose a large-field microscopic speckle interferometer which embeds two doublet lens groups in the improved Mach–Zehnder optical path structure to expand its field of view. At the same time, the new system can reduce the coherent noise of reflected light in the optical path. We use this new system to measure the dynamic displacement process of the entire surface of the microchips. The experimental results show that our improved measurement system can achieve large-field, real-time and high-precision dynamic measurement of micro-electromechanical systems (MEMS).

Development of a Compound Speckle Interferometer for Precision Three-Degree-of-Freedom Displacement Measurement

In this study, a compound speckle interferometer for measuring three-degree-of-freedom (3-DOF) displacement is proposed. The system, which combines heterodyne interferometry, speckle interferometry and beam splitting techniques, can perform precision 3-DOF displacement measurements, while still having the advantages of high resolution and a relatively simple configuration. The incorporation of speckle interferometry allows for non-contact displacement measurements by detecting the phase of the speckle interference pattern formed from the convergence of laser beams on the measured rough surface. Experiments were conducted to verify the measurement capabilities of the system, and the results show that the proposed system has excellent measurement capabilities suitable for future real-world applications.

Diffraction model of a laser speckle interferometer for measuring micro-displacements of objects with scattering surface

On the basis of diffraction transformations of an optical wave field a mathematical model for the formation of speckle modulated interference patterns and signals at the output of a speckle interferometer is developed, which allows us to identify their properties and quantitative parameters. Speckle interferometers based on a Michelson arrangement are considered, where objects with scattering surfaces are used instead of mirrors in the reference and object arms. Results of numerical simulation of speckle modulated interference patterns on the basis of diffraction transformations of wave fields in an interferometer are discussed. Simulated images obtained at the output of the interferometer when focusing laser beams on the scattering surfaces of the controlled and reference objects are considered. Experimental results of using a speckle interferometer with a digital matrix photodetector for measuring the temperature micro-displacements of an object with a scattering surface and a quantitative comparison of experimental data with the results obtained by a numerical experiment using a diffraction model of a speckle interferometer are presented.

Сдвиговый спекл-интерферометр с квадролинзой

The paper proposes a new optical element – Quad lens, which is used as part of a shearing speckle interferometer (sherograph) to provide measurements of stress-strain states of objects simultaneously in two mutually perpendicular directions. Quad lens consists of four identical sections cut from the original round lenses and spaced from each other to form a gap. Quad lens creates four images of an object that are offset relative to the optical axis by a distance that depends on the size of the gaps between the sectors. Phase recovery from a single speckle interferogram is performed using the spatial phase shift method based on the Fourier transform. To increase the contrast of interference bands, an aperture diaphragm with four holes is installed in front of quad lens sectors, and polarizing channel isolation can be used to separate channels and reduce the influence of cross interference. Experimental results of using a speckle interferometer with quad lens for the study of microdeformation of a round membrane are presented.