nanoparticle removal
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Elimination of blind zone in nanoparticle removal on silicon wafers using a double-beam laser shockwave cleaning process

2021 ◽  
Vol 539 ◽  
pp. 148057
Author(s):  
Shuowen Zhang ◽  
Qingyu Yan ◽  
Jian Lin ◽  
Qunli Zhang ◽  
Yongfeng Lu ◽  
...  
Keyword(s):  
Silicon Wafers ◽  
Cleaning Process ◽  
Blind Zone ◽  
Beam Laser ◽  
Double Beam ◽  
Nanoparticle Removal

Novel cleaning technology for nanoparticle removal

2019 ◽  
Author(s):  
Mana Tanabe ◽  
Kosuke Takai ◽  
Kyo Otsubo ◽  
Kaori Umezawa ◽  
Minako Iinuma ◽  
...  
Keyword(s):  
Nanoparticle Removal ◽  
Cleaning Technology

Regional effects and mechanisms of nanoparticle removal from Si substrate by laser plasma shock waves

2018 ◽  
Vol 457 ◽  
pp. 604-615 ◽  
Author(s):  
Qiongqiong Gu ◽  
Guoying Feng ◽  
Guorui Zhou ◽  
Jinghua Han ◽  
Ju Luo ◽  
...  
Keyword(s):  
Shock Waves ◽  
Laser Plasma ◽  
Si Substrate ◽  
Regional Effects ◽  
Nanoparticle Removal ◽  
Plasma Shock

Air filtration performance of symmetric polypropylene hollow-fibre membranes for nanoparticle removal

2018 ◽  
Vol 197 ◽  
pp. 122-128 ◽  
Author(s):  
Pavel Bulejko ◽  
Mirko Dohnal ◽  
Jiří Pospíšil ◽  
Tomáš Svěrák
Keyword(s):  
Hollow Fibre ◽  
Air Filtration ◽  
Filtration Performance ◽  
Nanoparticle Removal
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