feature size control
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Block copolymer lithography: Feature size control and extension by an over-etch technique

2012 ◽  
Vol 522 ◽  
pp. 318-323 ◽  
Author(s):  
Sozaraj Rasappa ◽  
Dipu Borah ◽  
Ramsankar Senthamaraikannan ◽  
Colm C. Faulkner ◽  
Matthew T. Shaw ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Size Control ◽  
Feature Size ◽  
Block Copolymer Lithography ◽  
Feature Size Control ◽  
Copolymer Lithography

Shape and Feature Size Control of Colloidal Crystal-Based Patterns Using Stretched Polydimethylsiloxane Replica Molds

Langmuir ◽  
2009 ◽  
Vol 25 (20) ◽  
pp. 12011-12014 ◽  
Author(s):  
Hong Kyoon Choi ◽  
Sang Hyuk Im ◽  
O Ok Park
Keyword(s):  
Colloidal Crystal ◽  
Size Control ◽  
Feature Size ◽  
Feature Size Control

Feature Size Control in IC Manufacturing

1982 ◽  
Vol 26 (5) ◽  
pp. 561-567 ◽  
Author(s):  
P. Frasch ◽  
K. H. Saremski
Keyword(s):  
Size Control ◽  
Feature Size ◽  
Ic Manufacturing ◽  
Feature Size Control
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