low temperature bonding
Recently Published Documents

TOTAL DOCUMENTS

259
(FIVE YEARS 48)

H-INDEX

25
(FIVE YEARS 5)
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Anodic Bonding a Low Temperature Bonding Method for Processed MEMS and CMOS Wafers

2021 ◽  
Author(s):  
Roy Knechtel ◽  
Hannes Mehner ◽  
Theresa Berthold ◽  
Carl Van Buggenhout ◽  
Dirk Terryn
Keyword(s):  
Low Temperature ◽  
Anodic Bonding ◽  
Low Temperature Bonding ◽  
Bonding Method

Surface smoothing of Au plated films by template stripping towards low-temperature bonding for 3D integration

2021 ◽  
Author(s):  
Le Hac Huong Thu ◽  
Takashi Matsumae ◽  
Yuichi Kurashima ◽  
Hideki Takagi ◽  
Eiji Higurashi
Keyword(s):  
Low Temperature ◽  
Surface Smoothing ◽  
3D Integration ◽  
Template Stripping ◽  
Low Temperature Bonding

Plasma-enhanced Si-SiC low-temperature bonding based on graphene composite slurry interlayer

2021 ◽  
Vol 293 ◽  
pp. 129710
Author(s):  
Ximing Ye ◽  
Jiankun Wan ◽  
Xiang Yin ◽  
Wenhua Yang ◽  
Chao Xie ◽  
...  
Keyword(s):  
Low Temperature ◽  
Graphene Composite ◽  
Low Temperature Bonding ◽  
Composite Slurry
Load More ...
Sign in / Sign up

Export Citation Format

Share Document