Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97

Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581760 ◽

2002 ◽

Cited By ~ 4

Author(s):

J.C. Lotters ◽

W. Olthuis ◽

P.H. Veltink ◽

P. Bergveld

Keyword(s):

Triaxial Accelerometer

LIGA-microtesting system with integrated strain gauges for force measurement

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581924 ◽

2002 ◽

Cited By ~ 4

Author(s):

P. Ruther ◽

W. Bacher ◽

K. Feit ◽

W. Menz

Keyword(s):

Force Measurement ◽

Strain Gauges

Self-supported Si fabrication of with STM nano-structure

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581791 ◽

2002 ◽

Author(s):

H. Hamanaka ◽

T. On ◽

E. Esashi

Keyword(s):

Nano Structure

A highly sensitive and small flow-type chemical analysis system with integrated absorptiometric micro-flowcell

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581779 ◽

2002 ◽

Cited By ~ 3

Author(s):

R. Miyake ◽

K. Tsuzuki ◽

T. Takagi ◽

K. Imai

Keyword(s):

Chemical Analysis ◽

Flow Type ◽

Highly Sensitive ◽

Small Flow ◽

Analysis System

Grand in purpose insignificant in size

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581730 ◽

2002 ◽

Author(s):

W. Trimmer

Touch mode capacitive pressure sensors for industrial applications

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581828 ◽

2002 ◽

Cited By ~ 16

Author(s):

W.H. Ko ◽

Qiang Wang

Keyword(s):

Pressure Sensors ◽

Industrial Applications

A three-dimensional shape memory alloy loop actuator

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581821 ◽

2002 ◽

Cited By ~ 11

Author(s):

Y. Nakamura ◽

S. Nakamura ◽

L. Buchaillot ◽

H. Fujita

Keyword(s):

Shape Memory Alloy ◽

Shape Memory ◽

Three Dimensional ◽

Dimensional Shape ◽

Three Dimensional Shape

Anisotropic-etching process simulation system MICROCAD analyzing complete 3D etching profiles of single crystal silicon

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581877 ◽

2002 ◽

Cited By ~ 18

Author(s):

K. Asaumi ◽

Y. Iriye ◽

K. Sato

Keyword(s):

Single Crystal ◽

Process Simulation ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Simulation System ◽

Etching Process ◽

Crystal Silicon

Electrostriction of polymer films for microactuators

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581811 ◽

2002 ◽

Cited By ~ 19

Author(s):

R. Pelrine ◽

R. Kornbluh ◽

J. Joseph ◽

S. Chiba

Keyword(s):

Polymer Films

Dot-matrix electrical discharge machining for shaping fine structure

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581797 ◽

2002 ◽

Cited By ~ 2

Author(s):

K. Furutani ◽

T. Enami ◽

N. Mohri

Keyword(s):

Fine Structure ◽

Electrical Discharge ◽

Electrical Discharge Machining

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

LIGA-microtesting system with integrated strain gauges for force measurement

Self-supported Si fabrication of with STM nano-structure

A highly sensitive and small flow-type chemical analysis system with integrated absorptiometric micro-flowcell

Grand in purpose insignificant in size

Touch mode capacitive pressure sensors for industrial applications

A three-dimensional shape memory alloy loop actuator

Anisotropic-etching process simulation system MICROCAD analyzing complete 3D etching profiles of single crystal silicon

Electrostriction of polymer films for microactuators

Dot-matrix electrical discharge machining for shaping fine structure

Export Citation Format

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

LIGA-microtesting system with integrated strain gauges for force measurement

Self-supported Si fabrication of with STM nano-structure

A highly sensitive and small flow-type chemical analysis system with integrated absorptiometric micro-flowcell

Grand in purpose insignificant in size

Touch mode capacitive pressure sensors for industrial applications

A three-dimensional shape memory alloy loop actuator

Anisotropic-etching process simulation system MICROCAD analyzing complete 3D etching profiles of single crystal silicon

Electrostriction of polymer films for microactuators

Dot-matrix electrical discharge machining for shaping fine structure

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97
Latest Publications