Patterning of self-assembly surfactant templated nanoporous silica thin film as an ultra low-k dielectric

2004 ◽  
Author(s):  
A.T. Cho ◽  
F.M. Pan ◽  
C.W. Yen ◽  
J.Y. Chen ◽  
Y.J. Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Self Assembly ◽  
Nanoporous Silica ◽  
Silica Thin Film ◽  
Low K

Novel Periodic Nanoporous Silicate Glass With High Structural Stability as Low-k Thin Film

2002 ◽  
Vol 716 ◽  
Author(s):  
Yoshiaki Oku ◽  
Norikazu Nishiyama ◽  
Shunsuke Tanaka ◽  
Korekazu Ueyama ◽  
Nobuhiro Hata ◽  
...  
Keyword(s):  
Thin Film ◽  
Dielectric Constant ◽  
Structural Stability ◽  
Silicate Glass ◽  
Porous Silica ◽  
Silica Film ◽  
Peak Position ◽  
Nanoporous Silica ◽  
High Structural Stability ◽  
Low K

AbstractWe have recently developed novel periodic nanoporous silicate glass with high structural stability as low-k thin film by spin-coating method. Periodic porous silicate glass films developed so far cause structural shrinkage (10>∼20% or more) by annealing the spin-coated films. In this investigation we adopt vapor-phase TEOS (tetraethoxysilane)-treatment before anneal. Our novel nanoporous film shows little shift of XRD peak position after annealed at 673K, indicating both the ultimate mechanical strength and the minimization of stress in the interface between the prepared film and the underlying substrate. Such a shrinkage-free periodic nanoporous silica film can possess higher VBD (break down voltage) and lower ILeak (leakage current). In this article we estimate structural properties (including information on pores introduced intentionally) by XRD and TEM observation, and electrical properties (dielectric constant, VBD and ILeak) by IV and CV measurement of this special-treated periodic nanoporous silica film. The dielectric constant of the thus prepared periodic porous silica film with silylation after calcination was evaluated to be around 1.8 at 100kHz.

Palladium Nanowire Thin Films via Template Growth

2003 ◽  
Vol 775 ◽  
Author(s):  
Donghai Wang ◽  
David T. Johnson ◽  
Byron F. McCaughey ◽  
J. Eric Hampsey ◽  
Jibao He ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Microscopy ◽  
Thin Films ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Conductive Substrate ◽  
Palladium Nanowires ◽  
Efficient Route ◽  
Silica Thin Film

AbstractPalladium nanowires have been electrodeposited into mesoporous silica thin film templates. Palladium continually grows and fills silica mesopores starting from a bottom conductive substrate, providing a ready and efficient route to fabricate a macroscopic palladium nanowire thin films for potentially use in fuel cells, electrodes, sensors, and other applications. X-ray diffraction (XRD) and transmission electron microscopy (TEM) indicate it is possible to create different nanowire morphology such as bundles and swirling mesostructure based on the template pore structure.

Designing a mesoporous hybrid organo-silica thin film prepared from an organic catalyst

2021 ◽  
Vol 2021 (2) ◽  
pp. 5-8
Author(s):  
Anna Sumardi ◽  
Muthia Elma ◽  
Erdina Lulu Atika Rampun ◽  
Aptar Eka Lestari ◽  
Zaini Lambri Assyaifi ◽  
...  
Keyword(s):  
Thin Film ◽  
Silica Thin Film ◽  
Organic Catalyst

scholarly journals Precise Synthesis and Thin Film Self-Assembly of PLLA-b-PS Bottlebrush Block Copolymers

Molecules ◽  
2021 ◽  
Vol 26 (5) ◽  
pp. 1412
Author(s):  
Eunkyung Ji ◽  
Cian Cummins ◽  
Guillaume Fleury
Keyword(s):  
Thin Film ◽  
Block Copolymers ◽  
Self Assembly ◽  
Ring Opening ◽  
Periodic Structures ◽  
One Pot ◽  
Ordered Structures ◽  
Carbonyl Chloride ◽  
Thin Film Patterning ◽  
Nanoporous Templates

The ability of bottlebrush block copolymers (BBCPs) to self-assemble into ordered large periodic structures could greatly expand the scope of photonic and membrane technologies. In this paper, we describe a two-step synthesis of poly(l-lactide)-b-polystyrene (PLLA-b-PS) BBCPs and their rapid thin-film self-assembly. PLLA chains were grown from exo-5-norbornene-2-methanol via ring-opening polymerization (ROP) of l-lactide to produce norbornene-terminated PLLA. Norbonene-terminated PS was prepared using anionic polymerization followed by a termination reaction with exo-5-norbornene-2-carbonyl chloride. PLLA-b-PS BBCPs were prepared from these two norbornenyl macromonomers by a one-pot sequential ring opening metathesis polymerization (ROMP). PLLA-b-PS BBCPs thin-films exhibited cylindrical and lamellar morphologies depending on the relative block volume fractions, with domain sizes of 46–58 nm and periodicities of 70–102 nm. Additionally, nanoporous templates were produced by the selective etching of PLLA blocks from ordered structures. The findings described in this work provide further insight into the controlled synthesis of BBCPs leading to various possible morphologies for applications requiring large periodicities. Moreover, the rapid thin film patterning strategy demonstrated (>5 min) highlights the advantages of using PLLA-b-PS BBCP materials beyond their linear BCP analogues in terms of both dimensions achievable and reduced processing time.

The characterization and preparation of porous low dielectric films using various cyclodextrins as template materials

2003 ◽  
Vol 766 ◽  
Author(s):  
Jin-Heong Yim ◽  
Jung-Bae Kim ◽  
Hyun-Dam Jeong ◽  
Yi-Yeoul Lyu ◽  
Sang Kook Mah ◽  
...  
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Dielectric Constant ◽  
Pore Structure ◽  
Pore Diameter ◽  
Dielectric Films ◽  
Low Dielectric Constant ◽  
Cyclodextrin Derivatives ◽  
Low Dielectric ◽  
Low K

AbstractPorous low dielectric films containing nano pores (∼20Å) with low dielectric constant (<2.2), have been prepared by using various kinds of cyclodextrin derivatives as porogenic materials. The pore structure such as pore size and interconnectivity can be controlled by changing functional groups of the cyclodextrin derivatives. We found that mechanical properties of porous low-k thin film prepared with mCSSQ (modified cyclic silsesquioxane) precursor and cyclodextrin derivatives were correlated with the pore interconnection length. The longer the interconnection length of nanopores in the thin film, the worse the mechanical properties of the thin film (such as hardness and modulus) even though the pore diameter of the films were microporous (∼2nm).

Electrochemical Characteristics of Aptasensor Based on MEMS Thin-Film Gold Electrode

2013 ◽  
Vol 562-565 ◽  
pp. 441-445
Author(s):  
Yan Xia Yan ◽  
Li Ying Jiang ◽  
Fen Fen Wang ◽  
Yan Zhang ◽  
Jie Hu
Keyword(s):  
Thin Film ◽  
Self Assembly ◽  
Gold Electrode ◽  
Ac Impedance ◽  
Optimum Concentration ◽  
Electrochemical Characteristics ◽  
Universal Method

A new fabrication methods of thin-film gold electrode is reported. Electrochemical characteristics of self-assembly aptasensor based on MEMS thin-film gold electrode has been studied by lots of experiments, characteristics include immobilizing time, AC impedance, CV curves. Experiments indicate immobilizing time of DNA-SH on gold electrode is more than 15 hours. CV curves and AC impedance of MEMS thin-film gold electrode show the same conclusion that 20μm/L DNA is optimum concentration when DNA is immobilized on gold electrode. Those results present a potential universal method for other aptasensors.

Nanoengineered electrochemical sensor based on mesoporous silica thin-film functionalized with thiol-terminated monolayer

The Analyst ◽  
2003 ◽  
Vol 128 (7) ◽  
pp. 899 ◽  
Author(s):  
Wassana Yantasee ◽  
Yuehe Lin ◽  
Xiaohong Li ◽  
Glen E. Fryxell ◽  
Thomas S. Zemanian ◽  
...  
Keyword(s):  
Thin Film ◽  
Mesoporous Silica ◽  
Electrochemical Sensor ◽  
Silica Thin Film ◽  
Mesoporous Silica Thin Film

Precrystalline P3HT nanowires: growth-controllable solution processing and effective molecular packing transfer to thin-film

CrystEngComm ◽  
2022 ◽  
Author(s):  
Seon-Mi Jin ◽  
Jun Ho Hwang ◽  
Jung Ah Lim ◽  
Eunji Lee
Keyword(s):  
Thin Film ◽  
Conjugated Polymers ◽  
Self Assembly ◽  
Optoelectronic Devices ◽  
Molecular Packing ◽  
Solution Processing ◽  
Roll To Roll ◽  
Nanowires Growth ◽  
Fundamental Research ◽  
Significant Attention

Solution-processable precrystalline nanowires (NWs) of conjugated polymers (CPs) have garnered significant attention in fundamental research based on crystallization-driven self-assembly and in the roll-to-roll fabrication of optoelectronic devices such as organic...

Symmetric Poly(ethylene oxide-b-styrene-b-isoprene) Triblock Copolymers: Synthesis, Characterization, and Self-Assembly in Bulk and Thin Film

2014 ◽  
Vol 47 (18) ◽  
pp. 6373-6381 ◽  
Author(s):  
Yali Qiao ◽  
Rachel Ferebee ◽  
Bongjoon Lee ◽  
Indranil Mitra ◽  
Nathaniel A. Lynd ◽  
...  
Keyword(s):  
Thin Film ◽  
Ethylene Oxide ◽  
Self Assembly ◽  
Triblock Copolymers ◽  
Poly Ethylene Oxide ◽  
Poly Ethylene
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