Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications

MEMS/NEMS ◽  
2007 ◽  
pp. 1429-1471 ◽  
Author(s):  
Huikai Xie ◽  
Shane Todd ◽  
Ankur Jain ◽  
Gary K. Fedder
2019 ◽  
Vol 48 (7) ◽  
pp. 2158-2181 ◽  
Author(s):  
Zhibin Luo ◽  
Tuo Wang ◽  
Jinlong Gong

This review describes recent developments of single-crystal silicon (Si) as the photoelectrode material for solar water splitting, including the promising strategies to obtain highly efficient and stable single-crystal Si-based photoelectrodes for hydrogen evolution and water oxidation, as well as the future development of spontaneous solar water splitting with single-crystal Si-based tandem cells.


1990 ◽  
Vol 182 ◽  
Author(s):  
Richard S. Muller

In 1982, Kurt Petersen published “Silicon as a Mechanical Material” in the Proceedings of the IEEE. This thorough review article heightened focus on the advantages of utilizing the mechanical as well as electrical properties of single-crystal silicon. Processes for shaping single-crystal silicon based upon selective etching were shown in the article to make silicon useful for a variety of miniature mechanical devices.


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