scholarly journals POST-CMOS COMPATIBLE ALUMINUM NITRIDE RING WAVE GUIDE (RWG) RESONATORS

2008 ◽  
Author(s):  
K.E. Wojciechowski ◽  
R.H. Olsson III ◽  
M.R. Tuck
Keyword(s):  
Aluminum Nitride ◽  
Wave Guide ◽  
Cmos Compatible

Maskless lithography of CMOS-compatible materials for hybrid plasmonic nanophotonics: aluminum nitride/aluminum oxide/aluminum waveguides

2018 ◽  
Vol 12 (02) ◽  
pp. 1 ◽  
Author(s):  
M. Joseph Roberts ◽  
Mark Moran ◽  
Linda F. Johnson ◽  
Will Freeman
Keyword(s):  
Aluminum Nitride ◽  
Aluminum Oxide ◽  
Maskless Lithography ◽  
Cmos Compatible

CMOS-compatible light-emitting devices based on thin aluminum nitride film containing Al nanocrystals

2009 ◽  
Vol 95 (3) ◽  
pp. 753-756 ◽  
Author(s):  
Y. Liu ◽  
T. P. Chen ◽  
M. Yang ◽  
Z. H. Cen ◽  
X. B. Chen ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Nitride Film ◽  
Light Emitting ◽  
Light Emitting Devices ◽  
Thin Aluminum ◽  
Cmos Compatible

Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

2009 ◽  
Vol 18 (3) ◽  
pp. 671-678 ◽  
Author(s):  
Roy H. Olsson ◽  
Kenneth E. Wojciechowski ◽  
Michael S. Baker ◽  
Melanie R. Tuck ◽  
James G. Fleming
Keyword(s):  
Aluminum Nitride ◽  
Mems Accelerometers ◽  
Cmos Compatible

scholarly journals Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

2009 ◽  
Vol 20 (2) ◽  
pp. 025008 ◽  
Author(s):  
Joseph C Doll ◽  
Bryan C Petzold ◽  
Biju Ninan ◽  
Ravi Mullapudi ◽  
Beth L Pruitt
Keyword(s):  
Aluminum Nitride ◽  
Piezoelectric Transducers ◽  
Cmos Compatible

Multi-Frequency Imaging with a CMOS Compatible Scandium Doped Aluminum Nitride PMUT Array

2021 ◽  
Author(s):  
Margo Billen ◽  
Hang Gao ◽  
Dries Tabruyn ◽  
Eloi Marigo ◽  
Mohan Soundara-Pandian ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Cmos Compatible

scholarly journals A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride

2020 ◽  
Vol 117 (18) ◽  
pp. 183506
Author(s):  
D. K. T. Ng ◽  
T. Zhang ◽  
L. Y. Siow ◽  
L. Xu ◽  
C. P. Ho ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Pyroelectric Detector ◽  
Cmos Compatible

Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors

2007 ◽  
Author(s):  
Roy H. Olsson ◽  
James G. Fleming ◽  
Kenneth E. Wojciechowski ◽  
Michael S. Baker ◽  
Melanie R. Tuck
Keyword(s):  
Aluminum Nitride ◽  
Resonant Sensors ◽  
Cmos Compatible
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