2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04
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The outlook for electronic systems and semiconductors

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393700 ◽

2005 ◽

Author(s):

E. Wu

Keyword(s):

Electronic Systems

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Supply chain driven - advanced taget delivery system

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393704 ◽

2005 ◽

Author(s):

Yih-Yi Lee ◽

N.N. Fan

Keyword(s):

Supply Chain ◽

Delivery System

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Learning software agent design for semiconductor tool group dispatching

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393705 ◽

2005 ◽

Author(s):

Shi-Chung Chang ◽

Yu-Ting Lin ◽

Yi-Ju Chang ◽

Shy-Kang Jeng ◽

Bo-Wei Hsieh

Keyword(s):

Software Agent ◽

Agent Design ◽

Learning Software

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Study of junction leakage caused by cobalt silicide defects

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393765 ◽

2005 ◽

Author(s):

L. Wang ◽

B. Bridgman ◽

G. Klein ◽

Liying Wu ◽

J. Darilek

Keyword(s):

Cobalt Silicide

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The outsourcing of SoC product development: Taiwan as the global center for SoC implementation

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393698 ◽

2005 ◽

Author(s):

Ding-Yuan Yang

Keyword(s):

Product Development ◽

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Unified framework for facility condition monitoring, detection, and diagnostics

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393712 ◽

2005 ◽

Author(s):

Huei-Shyang You ◽

Tzu-Chi Wang ◽

Wen-Yao Chang ◽

Chih-Wei Lai ◽

Ming-Wei Lee ◽

...

Keyword(s):

Condition Monitoring ◽

Unified Framework ◽

Facility Condition

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Using process experienced correlation table to improve the accuracy and reliability of data mining for yield improvement

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393746 ◽

2005 ◽

Author(s):

Haw-Jyue Luo ◽

S.R. Wang ◽

C.C. Chen ◽

Hung-En Tai ◽

Chen-Fu Chien ◽

...

Keyword(s):

Data Mining ◽

Yield Improvement ◽

Correlation Table

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Global CD uniformity improvement using dose modulation pattern correction of pattern density-dependent and position-dependent errors

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393734 ◽

2005 ◽

Author(s):

Chia-Jen Chen ◽

Hsin-Chang Lee ◽

Lee-Chih Yeh ◽

Kai-Chung Liu ◽

Ta-Cheng Lien ◽

...

Keyword(s):

Density Dependent ◽

Pattern Density ◽

Modulation Pattern ◽

Dose Modulation

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In-line inspection on thickness of sputtered HfO/sub 2/ and Hf metal ultra-thin films by spectroscopic ellipsometry

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393742 ◽

2005 ◽

Author(s):

Y. Chuo ◽

D.Y. Shu ◽

L.S. Lee ◽

W.Y. Hsieh ◽

M.J. Tsai ◽

...

Keyword(s):

Spectroscopic Ellipsometry

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An efficient yield enhancement from inline defect control and in-situ advanced process control

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393722 ◽

2005 ◽

Author(s):

Yi-Ko-Chen ◽

S. Tso ◽

Chung-I Chang ◽

Tings Wang

Keyword(s):

Process Control ◽

Yield Enhancement ◽

Advanced Process Control ◽

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