2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04
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The outlook for electronic systems and semiconductors

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393700 ◽

2005 ◽

Author(s):

E. Wu

Keyword(s):

Electronic Systems

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Supply chain driven - advanced taget delivery system

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393704 ◽

2005 ◽

Author(s):

Yih-Yi Lee ◽

N.N. Fan

Keyword(s):

Supply Chain ◽

Delivery System

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Learning software agent design for semiconductor tool group dispatching

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393705 ◽

2005 ◽

Cited By ~ 1

Author(s):

Shi-Chung Chang ◽

Yu-Ting Lin ◽

Yi-Ju Chang ◽

Shy-Kang Jeng ◽

Bo-Wei Hsieh

Keyword(s):

Software Agent ◽

Agent Design ◽

Learning Software

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Study of junction leakage caused by cobalt silicide defects

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393765 ◽

2005 ◽

Cited By ~ 1

Author(s):

L. Wang ◽

B. Bridgman ◽

G. Klein ◽

Liying Wu ◽

J. Darilek

Keyword(s):

Cobalt Silicide

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Using process experienced correlation table to improve the accuracy and reliability of data mining for yield improvement

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393746 ◽

2005 ◽

Author(s):

Haw-Jyue Luo ◽

S.R. Wang ◽

C.C. Chen ◽

Hung-En Tai ◽

Chen-Fu Chien ◽

...

Keyword(s):

Data Mining ◽

Yield Improvement ◽

Correlation Table

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Global CD uniformity improvement using dose modulation pattern correction of pattern density-dependent and position-dependent errors

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393734 ◽

2005 ◽

Author(s):

Chia-Jen Chen ◽

Hsin-Chang Lee ◽

Lee-Chih Yeh ◽

Kai-Chung Liu ◽

Ta-Cheng Lien ◽

...

Keyword(s):

Density Dependent ◽

Pattern Density ◽

Modulation Pattern ◽

Dose Modulation

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In-line inspection on thickness of sputtered HfO/sub 2/ and Hf metal ultra-thin films by spectroscopic ellipsometry

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393742 ◽

2005 ◽

Author(s):

Y. Chuo ◽

D.Y. Shu ◽

L.S. Lee ◽

W.Y. Hsieh ◽

M.J. Tsai ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry

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An efficient yield enhancement from inline defect control and in-situ advanced process control

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393722 ◽

2005 ◽

Author(s):

Yi-Ko-Chen ◽

S. Tso ◽

Chung-I Chang ◽

Tings Wang

Keyword(s):

Process Control ◽

Yield Enhancement ◽

Advanced Process Control ◽

Defect Control

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The outsourcing of SoC product development: Taiwan as the global center for SoC implementation

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393698 ◽

2005 ◽

Author(s):

Ding-Yuan Yang

Keyword(s):

Product Development ◽

Global Center

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Unified framework for facility condition monitoring, detection, and diagnostics

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04 ◽

10.1109/smtw.2004.1393712 ◽

2005 ◽

Author(s):

Huei-Shyang You ◽

Tzu-Chi Wang ◽

Wen-Yao Chang ◽

Chih-Wei Lai ◽

Ming-Wei Lee ◽

...

Keyword(s):

Condition Monitoring ◽

Unified Framework ◽

Facility Condition

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2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

The outlook for electronic systems and semiconductors

Supply chain driven - advanced taget delivery system

Learning software agent design for semiconductor tool group dispatching

Study of junction leakage caused by cobalt silicide defects

Using process experienced correlation table to improve the accuracy and reliability of data mining for yield improvement

Global CD uniformity improvement using dose modulation pattern correction of pattern density-dependent and position-dependent errors

In-line inspection on thickness of sputtered HfO/sub 2/ and Hf metal ultra-thin films by spectroscopic ellipsometry

An efficient yield enhancement from inline defect control and in-situ advanced process control

The outsourcing of SoC product development: Taiwan as the global center for SoC implementation

Unified framework for facility condition monitoring, detection, and diagnostics

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat No 04EX846) SMTW-04
Latest Publications