Proceedings of Ninth International Workshop on Micro Electromechanical Systems
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A monolithic optical displacement measurement microsystem

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.494015 ◽

2002 ◽

Author(s):

H.P. Zappe ◽

D. Hofstetter

Keyword(s):

Displacement Measurement ◽

Optical Displacement

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Exploring polysilicon micromotors for data storage micro disks

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.493853 ◽

2002 ◽

Author(s):

N.J. Mourlas ◽

K.C. Stark ◽

M. Mehregany ◽

S.M. Phillips

Keyword(s):

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A microactuator system for the study and control of screech in high speed jets

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.493823 ◽

2002 ◽

Author(s):

Chunchieh Huang ◽

J. Papp ◽

K. Najafi ◽

H.M. Nagib

Keyword(s):

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Fabrication of packaged thin beam structures by an improved drying method

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.493985 ◽

2002 ◽

Author(s):

M. Ohtsu ◽

K. Minami ◽

M. Esashi

Keyword(s):

Drying Method ◽

Beam Structures ◽

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Sputtered high |d/sub 31/| coefficient PZT thin film for microactuators

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.493991 ◽

2002 ◽

Author(s):

M. Sakata ◽

S. Wakabayashi ◽

H. Goto ◽

H. Totani ◽

M. Takeuchi ◽

...

Keyword(s):

Thin Film ◽

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Anodically bonded silicon membranes for sealed and flush mounted microsensors

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.493830 ◽

2002 ◽

Author(s):

S.F. Trautweiler ◽

O. Paul ◽

J. Stahl ◽

H. Baltes

Keyword(s):

Silicon Membranes

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Micro tensile-test system fabricated on a single crystal silicon chip

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.494008 ◽

2002 ◽

Author(s):

K. Sato ◽

M. Shikida ◽

M. Yamasaki ◽

T. Yoshioka

Keyword(s):

Tensile Test ◽

Single Crystal ◽

Single Crystal Silicon ◽

Test System ◽

Crystal Silicon

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Design and fabrication of a miniature pressure sensor head using direct bonded ultra-thin silicon wafers

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.493987 ◽

2002 ◽

Author(s):

C.E. Statler ◽

E.S. Olson ◽

K.R. Farmer ◽

T.G. Digges

Keyword(s):

Pressure Sensor ◽

Silicon Wafers ◽

Sensor Head ◽

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Comparison of wall attachment and jet deflection microfluidic amplifiers

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.494010 ◽

2002 ◽

Author(s):

R. Furlan ◽

J.N. Zemel

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Monolithic capillary gel electrophoresis stage with on-chip detector

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.494031 ◽

2002 ◽

Author(s):

J.R. Webster ◽

D.K. Jones ◽

C.H. Mastrangelo

Keyword(s):

Gel Electrophoresis ◽

Capillary Gel Electrophoresis ◽

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