Scanning spreading resistance microscopy for carrier profiling beyond 32nm node

2012 ◽  
Author(s):  
J. Mody ◽  
G. Zschatzsch ◽  
S. Kolling ◽  
A. De Keersgieter ◽  
G. Eneman ◽  
...  
Keyword(s):  
Spreading Resistance

Identification of Root Cause Failure in Silicon on Insulator Body Contacted nFETs Using Scanning Capacitance Microscopy and Scanning Spreading Resistance Microscopy

2006 ◽  
Author(s):  
J.S. McMurray ◽  
C.M. Molella
Keyword(s):  
The Body ◽  
Silicon On Insulator ◽  
Back Side ◽  
Cross Sectional ◽  
Plan View ◽  
Spreading Resistance ◽  
Scanning Capacitance Microscopy ◽  
Root Cause ◽  
Cross Sectional Imaging ◽  
Active Channel

Abstract Root cause for failure of 90 nm body contacted nFETs was identified using scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy (SSRM). The failure mechanism was identified using both cross sectional imaging and imaging of the active silicon - buried oxide (BOX) interface in plan view. This is the first report of back-side plan view SCM and SSRM data for SOI devices. This unique plan view shows the root cause for the failure is an under doped link up region between the body contacts and the active channel of the device.

Scanning spreading resistance microscopy of defect engineered low dose SIMOX samples

2007 ◽  
Vol 84 (3) ◽  
pp. 547-550 ◽  
Author(s):  
Lasse Vines ◽  
Reinhard Kögler ◽  
Andrej Yu. Kuznetsov
Keyword(s):  
Low Dose ◽  
Spreading Resistance

Thermal spreading resistance of ring-geometry diodes

1970 ◽  
Vol 17 (6) ◽  
pp. 482-484 ◽  
Author(s):  
E.D. Garlinger ◽  
H.L. Stover
Keyword(s):  
Spreading Resistance ◽  
Ring Geometry

High-resolution scanning spreading resistance microscopy of surrounding-gate transistors

2004 ◽  
Vol 22 (1) ◽  
pp. 377 ◽  
Author(s):  
D. Álvarez ◽  
S. Schömann ◽  
B. Goebel ◽  
D. Manger ◽  
T. Schlösser ◽  
...  
Keyword(s):  
High Resolution ◽  
Spreading Resistance ◽  
Surrounding Gate

Spreading resistance calculations by the variational method

1981 ◽  
Vol 24 (6) ◽  
pp. 557-562 ◽  
Author(s):  
S.C. Choo ◽  
M.S. Leong ◽  
L.S. Tan
Keyword(s):  
Variational Method ◽  
Spreading Resistance
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