MOEMS and Miniaturized Systems XX
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9781510642294, 9781510642300
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Compact and low power silicon photonic components based on MEMS

2021 ◽  
Author(s):  
Kristinn B. Gylfason ◽  
Pierre Edinger ◽  
Carlos Errando-Herranz ◽  
Alain Takabayashi ◽  
Hamed Sattari ◽  
...  
Keyword(s):  
Low Power ◽  
Silicon Photonic ◽  
Photonic Components

Compact detector unit based on the butterfly assembly for trace gas analysis

2021 ◽  
Author(s):  
Tobias Milde ◽  
Morten Hoppe ◽  
Hervé Tatenguem Fankem ◽  
Sebastian Schmidtmann ◽  
Martin Honsberg ◽  
...  
Keyword(s):  
Gas Analysis ◽  
Trace Gas ◽  
Trace Gas Analysis

Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators

2021 ◽  
Author(s):  
Christoph K. Hohle ◽  
Sebastian Döring ◽  
Martin Friedrichs ◽  
Andreas Gehner ◽  
Dirk Rudloff ◽  
...  
Keyword(s):  
Spatial Light Modulators ◽  
Light Modulators

Reflex optical phased array for autonomous vehicles using new scheme of LiDAR design

2021 ◽  
Author(s):  
Chia-Ming Liu ◽  
Chun-Nine Liu ◽  
Hsing-Kun Shih ◽  
Tien-Tsorng Shih ◽  
Charles W. Tu ◽  
...  
Keyword(s):  
Autonomous Vehicles ◽  
Phased Array ◽  
Optical Phased Array

A design and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures

2021 ◽  
Author(s):  
Shanshan Gu-Stoppel ◽  
Frank Senger ◽  
Lianzhi Wen ◽  
Erdem Yarar ◽  
Gunnar Wille ◽  
...  
Keyword(s):  
Design And Manufacturing ◽  
Manufacturing Platform

On-chip structure for optofluidic sensing using stable Fabry-Pérot resonator

2021 ◽  
Author(s):  
Abdelrahman Toraya ◽  
Noha Gaber Ali Aboulela ◽  
Frédéric Marty ◽  
Tarik Bourouina
Keyword(s):  
Fabry Perot ◽  
On Chip ◽  
Optofluidic Sensing
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