scholarly journals Factors limiting the doping efficiency in atomic layer deposited ZnO:Al thin films: a dopant distribution study by transmission electron microscopy and atom probe tomography

Author(s):  
Marcel Verheijen ◽  
Yizhi Wu ◽  
Devin Giddings ◽  
Ty Prosa ◽  
David Larson ◽  
...  
2019 ◽  
Vol 55 (6) ◽  
pp. 1382-1403 ◽  
Author(s):  
Josiah B. Lewis ◽  
Christine Floss ◽  
Dieter Isheim ◽  
Tyrone L. Daulton ◽  
David N. Seidman ◽  
...  

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