Factors limiting the doping efficiency in atomic layer deposited ZnO:Al thin films: a dopant distribution study by transmission electron microscopy and atom probe tomography
Marcel Verheijen
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Yizhi Wu
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Devin Giddings
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Ty Prosa
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David Larson
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...
2018 ◽
Vol 30
(4)
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pp. 1209-1217
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Yizhi Wu
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A. Devin Giddings
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Marcel A. Verheijen
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Bart Macco
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Ty J. Prosa
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...
2017 ◽
Vol 23
(S1)
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pp. 688-689
Jorg M.K. Wiezorek
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Kai W. Zweiacker
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Can Liu
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Isabelle Martin
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Ty. J. Prosa
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...
2015 ◽
Vol 89
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pp. 181-192
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Claudia M. Müller
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Alla S. Sologubenko
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Stephan S.A. Gerstl
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Ralph Spolenak
2019 ◽
Vol 55
(6)
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pp. 1382-1403
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Josiah B. Lewis
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Christine Floss
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Dieter Isheim
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Tyrone L. Daulton
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David N. Seidman
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...
2020 ◽
Vol 891
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pp. 012008
L Daly
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M R Lee
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P Bagot
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J Halpin
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W Smith
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...
2012 ◽
Vol 7
(1)
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pp. 732-739
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Yoon-Jun Kim
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Runzhe Tao
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Robert F. Klie
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David N. Seidman
2015 ◽
Vol 153
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pp. 32-39
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M. Herbig
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P. Choi
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D. Raabe
2015 ◽
Vol 64
(suppl 1)
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pp. i103.1-i103
J.-B. Seol
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M.J. Yao
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P. Dey
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D. Raabe
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C.-G. Park
2006 ◽
Vol 253
(2)
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pp. 606-617
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D.R.G. Mitchell
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A. Aidla
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J. Aarik
2017 ◽
Vol 23
(S1)
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pp. 668-669
Bastien Bonef
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Richard Cramer
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Feng Wu
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James S. Speck
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