A Single-Chamber System of Initiated Chemical Vapor Deposition and Atomic Layer Deposition for Fabrication of Organic/Inorganic Multilayer Films
2017 ◽
Vol 19
(6)
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pp. 1600819
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2014 ◽
Vol 131
(24)
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pp. n/a-n/a
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2016 ◽
Vol 34
(3)
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pp. 892-897
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2020 ◽
Vol 13
(7)
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pp. 1997-2023
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2019 ◽
Vol 37
(6)
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pp. 060903
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Keyword(s):
2019 ◽
Vol 16
(12)
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pp. 1900127
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2016 ◽
Vol 51
(11)
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pp. 5082-5091
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2007 ◽
Vol 111
(33)
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pp. 8147-8151
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2012 ◽
Vol 51
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pp. 121101
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