ChemInform Abstract: LARGE-SCALE GROWTH OF GALLIUM ARSENIDE EPITAXIAL LAYERS BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION

1985 ◽  
Vol 16 (37) ◽  
Author(s):  
J. L. TANDON ◽  
Y. C. M. YEH
Keyword(s):  
Gallium Arsenide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Large Scale ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Epitaxial Layers ◽  
Scale Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Characterization of crystallinity of Ge1−xSnx epitaxial layers grown using metal-organic chemical vapor deposition

2016 ◽  
Vol 602 ◽  
pp. 7-12 ◽  
Author(s):  
Yuki Inuzuka ◽  
Shinichi Ike ◽  
Takanori Asano ◽  
Wakana Takeuchi ◽  
Osamu Nakatsuka ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Epitaxial Layers ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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