Strain analysis of the GaN epitaxial layers grown on nitridated Si(111) substrate by metal organic chemical vapor deposition

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2012.06.013 ◽

2013 ◽

Vol 16 (1) ◽

pp. 83-88 ◽

Author(s):

Mustafa K. Ozturk ◽

Engin Arslan ◽

İlknur Kars ◽

Suleyman Ozcelik ◽

Ekmel Ozbay

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Strain Analysis ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Microstructural analysis of InGaN/GaN epitaxial layers of metal organic chemical vapor deposition on c-plane of convex patterned sapphire substrate

Thin Solid Films ◽

10.1016/j.tsf.2013.05.111 ◽

2013 ◽

Vol 546 ◽

pp. 104-107 ◽

Author(s):

Zhixin Wan ◽

Yinsheng He ◽

Cheljong Choi ◽

Eunkyung Suh ◽

Young Moon Yu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Microstructural Analysis ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Patterned Sapphire Substrate ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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ChemInform Abstract: LARGE-SCALE GROWTH OF GALLIUM ARSENIDE EPITAXIAL LAYERS BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION

Chemischer Informationsdienst ◽

10.1002/chin.198537336 ◽

1985 ◽

Vol 16 (37) ◽

Author(s):

J. L. TANDON ◽

Y. C. M. YEH

Keyword(s):

Gallium Arsenide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Large Scale ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Scale Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Characteristics of Ga1-x AlxAs epitaxial layers grown by metal organic chemical vapor deposition.

DENKI-SEIKO ◽

10.4262/denkiseiko.59.106 ◽

1988 ◽

Vol 59 (2) ◽

pp. 106-115

Author(s):

Toshihiro Kato ◽

Mitsuru Imaizumi ◽

Takashi Saka ◽

Eiichi Shichi

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Characterization of crystallinity of Ge1−xSnx epitaxial layers grown using metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2015.10.043 ◽

2016 ◽

Vol 602 ◽

pp. 7-12 ◽

Author(s):

Yuki Inuzuka ◽

Shinichi Ike ◽

Takanori Asano ◽

Wakana Takeuchi ◽

Osamu Nakatsuka ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Control of metamorphic buffer structure and device performance of InxGa1−xAs epitaxial layers fabricated by metal organic chemical vapor deposition

Nanotechnology ◽

10.1088/0957-4484/25/48/485205 ◽

2014 ◽

Vol 25 (48) ◽

pp. 485205 ◽

Author(s):

H Q Nguyen ◽

H W Yu ◽

Q H Luc ◽

Y Z Tang ◽

V T H Phan ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Device Performance ◽

Metamorphic Buffer ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Buffer Structure

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Optical properties of n-doped Ga[sub 1−x]Mn[sub x]N epitaxial layers grown by metal-organic chemical-vapor deposition in mid and far (5−50 μm) IR range

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2819259 ◽

2008 ◽

Vol 26 (1) ◽

pp. 52 ◽

Author(s):

A. B. Weerasekara ◽

Z. G. Hu ◽

N. Dietz ◽

A. G. U. Perera ◽

A. Asghar ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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High-quality InP epitaxial layers grown by metal-organic chemical vapor deposition using tertiarybutylphosphine (TBP) source

10.1117/12.190773 ◽

1994 ◽

Author(s):

H. Kuan ◽

Yan-Kuin Su ◽

W. J. Tzou

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

High Quality ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Doping of InGaP epitaxial layers grown by low pressure metal-organic chemical vapor deposition

Materials Science and Engineering B ◽

10.1016/0921-5107(93)90192-p ◽

1993 ◽

Vol 19 (3) ◽

pp. 234-239 ◽

Author(s):

C.C. Wu ◽

K.C. Lin ◽

S.H. Chan ◽

M.S. Feng ◽

C.Y. Chang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Epitaxial Layers ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Growth of AlGaN epitaxial layers and AlGaN/GaN superlattices by metal-organic chemical vapor deposition

Semiconductors ◽

10.1134/1.1766372 ◽

2004 ◽

Vol 38 (6) ◽

pp. 678-682 ◽

Author(s):

W. V. Lundin ◽

A. V. Sakharov ◽

A. F. Tsatsul’nikov ◽

E. E. Zavarin ◽

A. I. Besyul’kin ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Large‐Scale Growth of GaAs Epitaxial Layers by Metal Organic Chemical Vapor Deposition

Journal of The Electrochemical Society ◽

10.1149/1.2113925 ◽

1985 ◽

Vol 132 (3) ◽

pp. 662-668 ◽

Author(s):

J. L. Tandon ◽

Y. C. M. Yeh

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Large Scale ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Scale Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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