Ion energy distribution in a radio frequency sheath of plasma with Kappa electron velocity distribution

2020 ◽  
Vol 61 (2) ◽  
Author(s):  
Jing Ou ◽  
Yueheng Huang
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Velocity Distribution ◽  
Electron Velocity ◽  
Electron Velocity Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution

scholarly journals Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges

2013 ◽  
Vol 46 (8) ◽  
pp. 084016 ◽  
Author(s):  
Jan Trieschmann ◽  
Mohammed Shihab ◽  
Daniel Szeremley ◽  
Abd Elfattah Elgendy ◽  
Sara Gallian ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Radio Frequency Discharges ◽  
Energy Distribution Functions
Sign in / Sign up

Export Citation Format

Share Document