Retarding Field Analyzer for Ion Energy Distribution Measurement Through a Radio-Frequency or Pulsed Biased Sheath

2009 ◽  
Vol 6 (S1) ◽  
pp. S643-S648 ◽  
Author(s):  
David Gahan ◽  
Borislav Dolinaj ◽  
Chanel Hayden ◽  
Michael B. Hopkins
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Ion Energy ◽  
Distribution Measurement ◽  
Ion Energy Distribution

scholarly journals Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges

2013 ◽  
Vol 46 (8) ◽  
pp. 084016 ◽  
Author(s):  
Jan Trieschmann ◽  
Mohammed Shihab ◽  
Daniel Szeremley ◽  
Abd Elfattah Elgendy ◽  
Sara Gallian ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Radio Frequency Discharges ◽  
Energy Distribution Functions
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