Effect of increasing the microwave density in both continuous and pulsed wave mode on the growth of monocrystalline diamond films

2005 ◽  
Vol 202 (11) ◽  
pp. 2059-2065 ◽  
Author(s):  
A. Tallaire ◽  
J. Achard ◽  
F. Silva ◽  
A. Gicquel
Keyword(s):  
Diamond Films ◽  
Wave Mode ◽  
Monocrystalline Diamond

Preferential incorporation of defects in monocrystalline diamond films

1993 ◽  
Vol 2 (2-4) ◽  
pp. 92-99 ◽  
Author(s):  
B.G. Yacobi ◽  
J. Lebens ◽  
K.J. Vahala ◽  
A.R. Badzian ◽  
T. Badzian
Keyword(s):  
Diamond Films ◽  
Preferential Incorporation ◽  
Monocrystalline Diamond

Growth, Characterization and Device Development in Monocrystalline Diamond Films

1997 ◽  
Author(s):  
R. F. Davis ◽  
R. J. Nemanich ◽  
Z. Sitar ◽  
P. K. Baumann ◽  
W. Liu
Keyword(s):  
Diamond Films ◽  
Device Development ◽  
Growth Characterization ◽  
Monocrystalline Diamond

Enhanced deuterium diffusion in boron doped monocrystalline diamond films using bias-assisted MPCVD

2010 ◽  
Vol 374 (31-32) ◽  
pp. 3254-3257 ◽  
Author(s):  
J.C. Arnault ◽  
S. Saada ◽  
C. Mer-Calfati ◽  
F. Jomard ◽  
N. Habka ◽  
...  
Keyword(s):  
Diamond Films ◽  
Boron Doped ◽  
Monocrystalline Diamond

A Novel TEM Technique for Characterizing As-Grown CVD Diamond Films

1991 ◽  
Vol 49 ◽  
pp. 956-957 ◽  
Author(s):  
Z.L. Wang ◽  
J. Bentley ◽  
R.E. Clausing ◽  
L. Heatherly ◽  
L.L. Horton
Keyword(s):  
Diamond Films ◽  
Chemical Vapor ◽  
Growth Direction ◽  
Dark Field ◽  
Growth Surface ◽  
Specimen Preparation ◽  
Transmission Electron ◽  
Diffraction Patterns ◽  
First Time ◽  
Microstructural Studies

Microstructural studies by transmission electron microscopy (TEM) of diamond films grown by chemical vapor deposition (CVD) usually involve tedious specimen preparation. This process has been avoided with a technique that is described in this paper. For the first time, thick as-grown diamond films have been examined directly in a conventional TEM without thinning. With this technique, the important microstructures near the growth surface have been characterized. An as-grown diamond film was fractured on a plane containing the growth direction. It took about 5 min to prepare a sample. For TEM examination, the film was tilted about 30-45° (see Fig. 1). Microstructures of the diamond grains on the top edge of the growth face can be characterized directly by transmitted electron bright-field (BF) and dark-field (DF) images and diffraction patterns.

Characterization of homoepitaxial diamond films by Electron microscopy

1991 ◽  
Vol 49 ◽  
pp. 880-881
Author(s):  
D.P. Malta ◽  
S.A. Willard ◽  
R.A. Rudder ◽  
G.C. Hudson ◽  
J.B. Posthill ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Surface Defects ◽  
Substrate Surface ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Polycrystalline Diamond ◽  
Large Degree ◽  
Rf Plasma ◽  
Semiconducting Diamond

Semiconducting diamond films have the potential for use as a material in which to build active electronic devices capable of operating at high temperatures or in high radiation environments. A major goal of current device-related diamond research is to achieve a high quality epitaxial film on an inexpensive, readily available, non-native substrate. One step in the process of achieving this goal is understanding the nucleation and growth processes of diamond films on diamond substrates. Electron microscopy has already proven invaluable for assessing polycrystalline diamond films grown on nonnative surfaces.The quality of the grown diamond film depends on several factors, one of which is the quality of the diamond substrate. Substrates commercially available today have often been found to have scratched surfaces resulting from the polishing process (Fig. 1a). Electron beam-induced current (EBIC) imaging shows that electrically active sub-surface defects can be present to a large degree (Fig. 1c). Growth of homoepitaxial diamond films by rf plasma-enhanced chemical vapor deposition (PECVD) has been found to planarize the scratched substrate surface (Fig. 1b).

Wave-Mode Coordinates and Scattering Matrices for Wave Propagation.

1986 ◽  
Author(s):  
James H. Williams ◽  
Nagem Jr. ◽  
Yeung Raymond J. ◽  
Hubert K.
Keyword(s):  
Wave Propagation ◽  
Wave Mode ◽  
Scattering Matrices

Fracture Studies of Diamond Films on Silicon

1991 ◽  
Author(s):  
Jr Mecholsky ◽  
Tsai J. J. ◽  
Drawl Y. L. ◽  
W. R.
Keyword(s):  
Diamond Films
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