Synthesis of wide bandgap Ga2 O3 (E g  ∼ 4.6-4.7 eV) thin films on sapphire by low pressure chemical vapor deposition

2015 ◽  
Vol 213 (4) ◽  
pp. 1002-1009 ◽  
Author(s):  
Subrina Rafique ◽  
Lu Han ◽  
Hongping Zhao
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Wide Bandgap ◽  
Pressure Chemical

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection

Homoepitaxial growth of β-Ga2O3 thin films by low pressure chemical vapor deposition

2016 ◽  
Vol 108 (18) ◽  
pp. 182105 ◽  
Author(s):  
Subrina Rafique ◽  
Lu Han ◽  
Marko J. Tadjer ◽  
Jaime A. Freitas ◽  
Nadeemullah A. Mahadik ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Homoepitaxial Growth ◽  
Pressure Chemical

Direct Liquid Injection − Low Pressure Chemical Vapor Deposition of Silica Thin Films from Di-t-butoxydiacetoxysilane

2017 ◽  
Vol 19 (12) ◽  
pp. 1700425 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Silica Thin Films ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection

Hydrogenation of low-pressure chemical-vapor-deposition silicon thin films

1987 ◽  
Vol 36 (17) ◽  
pp. 9168-9170 ◽  
Author(s):  
P. X. Zhang ◽  
X. W. Wu ◽  
J. Yao ◽  
S. K. Wong ◽  
P. K. John ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Silicon Thin Films ◽  
Pressure Chemical
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