scholarly journals Development of Rutile Titanium Oxide Thin Films as Battery Material Component Using Atomic Layer Deposition

2019 ◽  
Vol 217 (13) ◽  
pp. 1800769 ◽  
Author(s):  
Alireza M. Kia ◽  
Sascha Bönhardt ◽  
Sabine Zybell ◽  
Kati Kühnel ◽  
Nora Haufe ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Material Component ◽  
Battery Material

Dysprosium oxide and dysprosium-oxide-doped titanium oxide thin films grown by atomic layer deposition

2015 ◽  
Vol 33 (1) ◽  
pp. 01A127 ◽  
Author(s):  
Aile Tamm ◽  
Jekaterina Kozlova ◽  
Lauri Aarik ◽  
Jaan Aarik ◽  
Kaupo Kukli ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Dysprosium Oxide ◽  
Layer Deposition

Holmium titanium oxide thin films grown by atomic layer deposition

2014 ◽  
Vol 565 ◽  
pp. 261-266 ◽  
Author(s):  
Kaupo Kukli ◽  
Marianna Kemell ◽  
Mukesh Chandra Dimri ◽  
Esa Puukilainen ◽  
Aile Tamm ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Atomic layer deposition of ferromagnetic cobalt doped titanium oxide thin films

2011 ◽  
Vol 519 (10) ◽  
pp. 3318-3324 ◽  
Author(s):  
Viljami Pore ◽  
Mukesh Dimri ◽  
Himani Khanduri ◽  
Raivo Stern ◽  
Jun Lu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Ferromagnetic Cobalt

Conduction and stability of holmium titanium oxide thin films grown by atomic layer deposition

2015 ◽  
Vol 591 ◽  
pp. 55-59 ◽  
Author(s):  
H. Castán ◽  
H. García ◽  
S. Dueñas ◽  
L. Bailón ◽  
E. Miranda ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition

2012 ◽  
Vol 210 (2) ◽  
pp. 276-284 ◽  
Author(s):  
Jaesang Lee ◽  
Seung Jae Lee ◽  
Won Bae Han ◽  
Heeyoung Jeon ◽  
Jingyu Park ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Temperature Dependence ◽  
Titanium Oxide ◽  
Deposition Temperature ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Remote Plasma ◽  
Layer Deposition

Atomic Layer Deposition (ALD) of Bismuth Titanium Oxide Thin Films Using Direct Liquid Injection (DLI) Method

2003 ◽  
Vol 59 (1) ◽  
pp. 1483-1489 ◽  
Author(s):  
Young Jin Cho ◽  
Yo-Sep Min ◽  
Jung-Hyun Lee ◽  
Bum-Seok Seo ◽  
June Key Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Liquid Injection ◽  
Direct Liquid Injection

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

Retention of Surface Structure Causes Lower Density in Atomic Layer Deposition of Amorphous Titanium Oxide Thin Films

2021 ◽  
Author(s):  
Benjamin Rich ◽  
Yael Etinger-Geller ◽  
G. Ciatto ◽  
A Katsman ◽  
Boaz Pokroy
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Structure ◽  
Titanium Oxide ◽  
Size Effects ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Structural Modifications ◽  
Layer Deposition ◽  
Amorphous Tio2

Size effects and structural modifications in amorphous TiO2 films deposited by atomic layer deposition (ALD) were investigated. As with the previously investigated ALD-deposited Al2O3 system we found that the film’s...

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

2014 ◽  
Vol 20 (7-8-9) ◽  
pp. 217-223 ◽  
Author(s):  
Timothee Blanquart ◽  
Mikko Kaipio ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition
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