Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition

2012 ◽  
Vol 210 (2) ◽  
pp. 276-284 ◽  
Author(s):  
Jaesang Lee ◽  
Seung Jae Lee ◽  
Won Bae Han ◽  
Heeyoung Jeon ◽  
Jingyu Park ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Temperature Dependence ◽  
Titanium Oxide ◽  
Deposition Temperature ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Remote Plasma ◽  
Layer Deposition

Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment

2019 ◽  
Vol 40 (1) ◽  
pp. 012806 ◽  
Author(s):  
Hui Hao ◽  
Xiao Chen ◽  
Zhengcheng Li ◽  
Yang Shen ◽  
Hu Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Plasma Pretreatment

Dysprosium oxide and dysprosium-oxide-doped titanium oxide thin films grown by atomic layer deposition

2015 ◽  
Vol 33 (1) ◽  
pp. 01A127 ◽  
Author(s):  
Aile Tamm ◽  
Jekaterina Kozlova ◽  
Lauri Aarik ◽  
Jaan Aarik ◽  
Kaupo Kukli ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Dysprosium Oxide ◽  
Layer Deposition

Holmium titanium oxide thin films grown by atomic layer deposition

2014 ◽  
Vol 565 ◽  
pp. 261-266 ◽  
Author(s):  
Kaupo Kukli ◽  
Marianna Kemell ◽  
Mukesh Chandra Dimri ◽  
Esa Puukilainen ◽  
Aile Tamm ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Low-temperature atomic layer deposition of crystalline manganese oxide thin films

2016 ◽  
Vol 45 (46) ◽  
pp. 18737-18741 ◽  
Author(s):  
Hua Jin ◽  
Dirk Hagen ◽  
Maarit Karppinen
Keyword(s):  
Thin Films ◽  
Phase Composition ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Manganese Oxide ◽  
Deposition Temperature ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

We present a new low-temperature atomic layer deposition (ALD) process based on Mn2(CO)10and ozone as precursors to fabricate crystalline α-Mn2O3and Mn3O4thin films; the phase composition is controlled by the deposition temperature such that the former phase forms in the range 60–100 °C and the latter in the range 120–160 °C.

Atomic layer deposition of ferromagnetic cobalt doped titanium oxide thin films

2011 ◽  
Vol 519 (10) ◽  
pp. 3318-3324 ◽  
Author(s):  
Viljami Pore ◽  
Mukesh Dimri ◽  
Himani Khanduri ◽  
Raivo Stern ◽  
Jun Lu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Ferromagnetic Cobalt

Conduction and stability of holmium titanium oxide thin films grown by atomic layer deposition

2015 ◽  
Vol 591 ◽  
pp. 55-59 ◽  
Author(s):  
H. Castán ◽  
H. García ◽  
S. Dueñas ◽  
L. Bailón ◽  
E. Miranda ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Development of Rutile Titanium Oxide Thin Films as Battery Material Component Using Atomic Layer Deposition

2019 ◽  
Vol 217 (13) ◽  
pp. 1800769 ◽  
Author(s):  
Alireza M. Kia ◽  
Sascha Bönhardt ◽  
Sabine Zybell ◽  
Kati Kühnel ◽  
Nora Haufe ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Material Component ◽  
Battery Material

Atomic Layer Deposition (ALD) of Bismuth Titanium Oxide Thin Films Using Direct Liquid Injection (DLI) Method

2003 ◽  
Vol 59 (1) ◽  
pp. 1483-1489 ◽  
Author(s):  
Young Jin Cho ◽  
Yo-Sep Min ◽  
Jung-Hyun Lee ◽  
Bum-Seok Seo ◽  
June Key Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Liquid Injection ◽  
Direct Liquid Injection

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

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