Nano‐micro characterization of defects on silicon surfaces. An industrial perspective of metrology challenges

2018 ◽

Vol 27 (8) ◽

pp. 087401 ◽

Cited By ~ 1

Author(s):

T Iqbal ◽

M Abrar ◽

M B Tahir ◽

M Seemab ◽

A Majid ◽

...

Keyword(s):

Silicon Surfaces ◽

Laser Induced Breakdown Spectroscopy ◽

Breakdown Spectroscopy ◽

Laser Induced Breakdown

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Characterization of silicon surfaces in HF solution using microwave reflectivity

Journal of Applied Physics ◽

10.1063/1.366945 ◽

1998 ◽

Vol 83 (4) ◽

pp. 2112-2120 ◽

Cited By ~ 10

Author(s):

Arun Natarajan ◽

Gerko Oskam ◽

Peter C. Searson

Keyword(s):

Silicon Surfaces

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Scanning tunneling microscopy and atomic force microscopy characterization of polystyrene spin-coated onto silicon surfaces

Langmuir ◽

10.1021/la00039a030 ◽

1992 ◽

Vol 8 (3) ◽

pp. 920-926 ◽

Cited By ~ 63

Author(s):

T. G. Stange ◽

Roy Mathew ◽

D. Fennell Evans ◽

W. A. Hendrickson

Keyword(s):

Atomic Force Microscopy ◽

Scanning Tunneling Microscopy ◽

Silicon Surfaces ◽

Scanning Tunneling ◽

Tunneling Microscopy ◽

Force Microscopy ◽

Atomic Force ◽

Microscopy Characterization ◽

Atomic Force Microscopy Characterization

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Thermal characterization of nanoporous 'black silicon' surfaces

10.1117/12.2237042 ◽

2016 ◽

Author(s):

Logan Nichols ◽

Wenqi Duan ◽

Fatima Toor

Keyword(s):

Thermal Characterization ◽

Silicon Surfaces ◽

Black Silicon

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One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance

Scientific Reports ◽

10.1038/srep35183 ◽

2016 ◽

Vol 6 (1) ◽

Cited By ~ 2

Author(s):

Ling Schneider ◽

Nikolaj A. Feidenhans’l ◽

Agnieszka Telecka ◽

Rafael J. Taboryski

Keyword(s):

Optical Characterization ◽

Color Appearance ◽

Silicon Surfaces ◽

One Step ◽

Antireflective Properties

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Physical and Electrochemical Characterization of Crystalline Silicon Surfaces Modified by Aluminum

physica status solidi (a) ◽

10.1002/pssa.201700543 ◽

2017 ◽

Vol 215 (2) ◽

pp. 1700543

Author(s):

Danilo Roque Huanca ◽

Walter Jaimes Salcedo

Keyword(s):

Crystalline Silicon ◽

Electrochemical Characterization ◽

Silicon Surfaces

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Characterization of vapor deposited poly (ethylene glycol) films on silicon surfaces for surface modification of microfluidic systems

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1545733 ◽

2003 ◽

Vol 21 (2) ◽

pp. 645 ◽

Cited By ~ 20

Author(s):

Ketul C. Popat ◽

Robert W. Johnson ◽

Tejal A. Desai

Keyword(s):

Surface Modification ◽

Ethylene Glycol ◽

Silicon Surfaces ◽

Poly Ethylene Glycol ◽

Microfluidic Systems ◽

Poly Ethylene

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Growth and characterization of indium phosphide single-crystal nanoneedles on microcrystalline silicon surfaces

Applied Physics A ◽

10.1007/s00339-006-3663-4 ◽

2006 ◽

Vol 85 (1) ◽

pp. 1-6 ◽

Cited By ~ 21

Author(s):

N.P. Kobayashi ◽

S.-Y. Wang ◽

C. Santori ◽

R.S. Williams

Keyword(s):

Indium Phosphide ◽

Single Crystal ◽

Silicon Surfaces ◽

Microcrystalline Silicon

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Non-Destructive Characterization of Electronic Properties of Pre- and Post-Processing Silicon Surfaces by UHV Contactless Capacitance-Voltage Method

10.7567/ssdm.1998.a-5-3 ◽

1998 ◽

Cited By ~ 1

Author(s):

Toshiyuki Yoshida ◽

Tamotsu Hashizume ◽

Hideki Hasegawa ◽

Takamasa Sakai

Keyword(s):

Electronic Properties ◽

Silicon Surfaces ◽

Post Processing ◽

Capacitance Voltage ◽

Non Destructive ◽

Non Destructive Characterization

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Characterization of the dielectric properties of covalently attached organic films on silicon surfaces

Thin Solid Films ◽

10.1016/j.tsf.2011.04.217 ◽

2011 ◽

Vol 519 (19) ◽

pp. 6472-6479 ◽

Cited By ~ 6

Author(s):

Fahimeh Shamsi ◽

Hans Coster ◽

Terry Chilcott

Keyword(s):

Dielectric Properties ◽

Silicon Surfaces ◽

Organic Films

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Nano‐micro characterization of defects on silicon surfaces. An industrial perspective of metrology challenges

Characterization of ion irradiated silicon surfaces ablated by laser-induced breakdown spectroscopy

Characterization of silicon surfaces in HF solution using microwave reflectivity

Scanning tunneling microscopy and atomic force microscopy characterization of polystyrene spin-coated onto silicon surfaces

Thermal characterization of nanoporous 'black silicon' surfaces

One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance

Physical and Electrochemical Characterization of Crystalline Silicon Surfaces Modified by Aluminum

Characterization of vapor deposited poly (ethylene glycol) films on silicon surfaces for surface modification of microfluidic systems

Growth and characterization of indium phosphide single-crystal nanoneedles on microcrystalline silicon surfaces

Non-Destructive Characterization of Electronic Properties of Pre- and Post-Processing Silicon Surfaces by UHV Contactless Capacitance-Voltage Method

Characterization of the dielectric properties of covalently attached organic films on silicon surfaces

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