Low temperature aluminum doped zinc oxide thin film deposition on ultra-thin flexible glass and PET substrates by RF magnetron sputtering

2015 ◽  
Vol 12 (9-11) ◽  
pp. 1215-1219 ◽  
Author(s):  
Zeynep Demircioğlu ◽  
Engin Özkol ◽  
Hisham Nasser ◽  
Raşit Turan
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Aluminum Doped Zinc Oxide

Fabrication of Amorphous Indium Gallium Zinc Oxide Thin Film Transistor at Low Temperature by RF Magnetron Sputtering

2012 ◽  
Vol 33 (10) ◽  
pp. 1149-1152 ◽  
Author(s):  
信恩龙 XIN En-long ◽  
李喜峰 LI Xi-feng ◽  
陈龙龙 CHEN Long-long ◽  
石继锋 SHI Ji-feng ◽  
李春亚 LI Chun-ya ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Thin Film Transistor ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Film ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Thin Film ◽  
Indium Gallium

scholarly journals Zinc Oxide Thin-Film Transistors Fabricated at Low Temperature by Chemical Spray Pyrolysis

2014 ◽  
Vol 43 (11) ◽  
pp. 4241-4245 ◽  
Author(s):  
Yesul Jeong ◽  
Christopher Pearson ◽  
Yong Uk Lee ◽  
Lee Winchester ◽  
Jaeeun Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Spray Pyrolysis ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Chemical Spray Pyrolysis ◽  
Zinc Oxide Thin Film ◽  
Chemical Spray
Sign in / Sign up

Export Citation Format

Share Document