scholarly journals Scanning electron microscope image signal-to-noise ratio monitoring for micro-nanomanipulation

Scanning ◽  
2014 ◽  
Vol 36 (4) ◽  
pp. 419-429 ◽  
Author(s):  
Naresh Marturi ◽  
Sounkalo Dembélé ◽  
Nadine Piat
1993 ◽  
Vol 32 (Part 1, No. 12B) ◽  
pp. 6281-6286 ◽  
Author(s):  
Masatoshi Kotera ◽  
Satoru Yamaguchi ◽  
Sachio Umegaki ◽  
Hiroshi Suga

1994 ◽  
Vol 354 ◽  
Author(s):  
A. Bosacchi ◽  
S. Franchi ◽  
D. Govoni ◽  
G. Mattei ◽  
P.G. Merli ◽  
...  

AbstractObservations of semiconductor superstructures with backscattered electrons in a scanning electron microscope have been used to revisit the concept of resolution of the backscattering imaging mode. It will be shown that the generation volume doesn't represent in itself a limit to the resolution, which depends only on the beam size and the signal to noise ratio.


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