scholarly journals Application of the low-loss scanning electron microscope image to integrated circuit technology. Part 1- applications to accurate dimension measurements

Scanning ◽  
2001 ◽  
Vol 23 (5) ◽  
pp. 298-304 ◽  
Author(s):  
Michael T. Postek ◽  
András E. Vladár ◽  
Oliver C. Wells ◽  
Jerry L. Lowney
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Integrated Circuit ◽  
Scanning Electron Microscope Image ◽  
Low Loss ◽  
Microscope Image ◽  
Electron Microscope Image ◽  
Circuit Technology ◽  
Scanning Electron

Simulation of Scanning Electron Microscope Image for Trench Structures

1993 ◽  
Vol 32 (Part 1, No. 12B) ◽  
pp. 6281-6286 ◽  
Author(s):  
Masatoshi Kotera ◽  
Satoru Yamaguchi ◽  
Sachio Umegaki ◽  
Hiroshi Suga
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Electron Microscope Image ◽  
Microscope Image ◽  
Electron Microscope Image ◽  
Scanning Electron
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