Characterization of trace embedded impurities in thin multilayer structures using synchrotron X-ray standing waves

2010 ◽  
Vol 42 (2) ◽  
pp. 110-116 ◽  
Author(s):  
M. K. Tiwari ◽  
K. J. S. Sawhney ◽  
G. S. Lodha
Keyword(s):  
Standing Waves ◽  
Multilayer Structures ◽  
X Ray

Characterization of amorphous-Si/1ML-Ge/Si(001) Interface Structure by X-ray Standing Waves

2003 ◽  
Vol 42 (Part 1, No. 11) ◽  
pp. 7050-7052 ◽  
Author(s):  
Shinichiro Nakatani ◽  
Kazushi Sumitani ◽  
Akinobu Nojima ◽  
Toshio Takahashi ◽  
Keiichi Hirano ◽  
...  
Keyword(s):  
Standing Waves ◽  
Interface Structure ◽  
X Ray ◽  
Amorphous Si

Characterization Of Multilayer Structures For Soft X-Ray Laser Research

1987 ◽  
Author(s):  
M. Kuhne ◽  
K. Danzmann ◽  
P. Muller ◽  
B. Wende ◽  
N. M. Ceglio ◽  
...  
Keyword(s):  
Multilayer Structures ◽  
X Ray

Characterization of Inconel/Carbon Multilayer Structures

1991 ◽  
Vol 238 ◽  
Author(s):  
J. Liu ◽  
Y. Cheng ◽  
M. W. Lund ◽  
Q. Wang ◽  
A. Higgs
Keyword(s):  
High Resolution Electron Microscopy ◽  
Optical Systems ◽  
Multilayer Structures ◽  
High Angle ◽  
Dc Magnetron Sputtering ◽  
X Ray ◽  
X Ray Scattering ◽  
Resolution Electron ◽  
Microscopy Techniques

ABSTRACTDC magnetron sputtering technique is used to fabricate inconel/carbon multilayers (ML) for applications in soft x-ray optical systems. The ML films were characterized by small angle x-ray scattering (SAXS), high resolution electron microscopy (HREM) and high-angle annular darkfield (HAADF) microscopy techniques. The HREM showed that the ML films are composed of smooth layers of amorphous components. The HAADF showed strong interdiffusion between inconel and carbon. There is no indication of any pure inconel or carbon regions in the ML films.

X-ray standing waves in LSM for characterization of ultra-thin films

1993 ◽  
Vol 26 (4A) ◽  
pp. A206-A209 ◽  
Author(s):  
S I Zheludeva ◽  
M V Kovalchuk ◽  
N N Novikova ◽  
A N Sosphenov
Keyword(s):  
Thin Films ◽  
Standing Waves ◽  
X Ray

Structural characterization of the (1 monolayer Sb)/GaP(110) interface using x-ray standing waves

1992 ◽  
Vol 46 (11) ◽  
pp. 6869-6874 ◽  
Author(s):  
K. E. Miyano ◽  
T. Kendelewicz ◽  
J. C. Woicik ◽  
P. L. Cowan ◽  
C. E. Bouldin ◽  
...  
Keyword(s):  
Structural Characterization ◽  
Standing Waves ◽  
X Ray

X-Ray Characterization of Buried δ Layers

1998 ◽  
Vol 05 (01) ◽  
pp. 145-149 ◽  
Author(s):  
J. Falta ◽  
D. Bahr ◽  
G. Materlik ◽  
B. H. Müller ◽  
M. Horn-Von Hoegen
Keyword(s):  
Lattice Constant ◽  
Linear Dependence ◽  
Standing Waves ◽  
Interface Roughness ◽  
Tetragonal Distortion ◽  
Detailed Characterization ◽  
X Ray ◽  
Lattice Position

A combination of measurements of crystal truncation roda and X-ray standing waves has been used for a detailed characterization of buried Ge δ layers on Si(001). Measurements of crystal truncation rods reveal the interface roughness, the δ layer lattice constant and the δ layer concentration. From measurements with X-ray standing waves the dopant lattice position and crystallinity of the δ layer are determined. We find a linear dependence of the local tetragonal distortion of the Ge bonding in the δ layer on the Ge concentration in the layer.

Characterization of Multilayer Structures for Soft X-ray Dispersion

1987 ◽  
Author(s):  
J. V. Gilfrich ◽  
D. B. Brown ◽  
D. Rosen
Keyword(s):  
Multilayer Structures ◽  
X Ray
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