X-Ray Characterization of Buried δ Layers
1998 ◽
Vol 05
(01)
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pp. 145-149
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Keyword(s):
X Ray
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A combination of measurements of crystal truncation roda and X-ray standing waves has been used for a detailed characterization of buried Ge δ layers on Si(001). Measurements of crystal truncation rods reveal the interface roughness, the δ layer lattice constant and the δ layer concentration. From measurements with X-ray standing waves the dopant lattice position and crystallinity of the δ layer are determined. We find a linear dependence of the local tetragonal distortion of the Ge bonding in the δ layer on the Ge concentration in the layer.
Interface roughness and density characterization of multilayer mirrors by using X-ray standing waves
1996 ◽
Vol 80
◽
pp. 449-452
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1995 ◽
Vol 34
(Part 1, No. 6A)
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pp. 3290-3293
2003 ◽
Vol 42
(Part 1, No. 11)
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pp. 7050-7052
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2011 ◽
Vol 299-300
◽
pp. 764-769
2019 ◽
Vol 807
◽
pp. 1-10
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