Characterization of amorphous-Si/1ML-Ge/Si(001) Interface Structure by X-ray Standing Waves

2003 ◽  
Vol 42 (Part 1, No. 11) ◽  
pp. 7050-7052 ◽  
Author(s):  
Shinichiro Nakatani ◽  
Kazushi Sumitani ◽  
Akinobu Nojima ◽  
Toshio Takahashi ◽  
Keiichi Hirano ◽  
...  
1996 ◽  
Vol 52 (a1) ◽  
pp. C475-C475
Author(s):  
B. Capelle ◽  
J. F. Petroff ◽  
J. C. Boulliard ◽  
A. Koebel ◽  
Y. Zheng

Author(s):  
Manfred P. Hentschel ◽  
Karl-Wolfram Harbich ◽  
Joerg Schors ◽  
Axel Lange

Advanced ceramics require specific methods for their nondestructive characterization. X-ray refraction techniques determine the specific surfaces and interfaces of high performance ceramics, composites and other low density materials down to nano-meter dimensions. X-ray refraction occurs due to the interference of phase shifted X-rays in ultra small angle X-ray scattering (USAXS) at objects above 100 nm size. Applications to monolithic ceramics and ceramic composites are presented. The well localized mean pore size of ceramics and the crack growth of ceramic composites are measured non-destructively.


2002 ◽  
Vol 65 (19) ◽  
Author(s):  
Andreas Klust ◽  
Markus Bierkandt ◽  
Joachim Wollschläger ◽  
Bernhard H. Müller ◽  
Thomas Schmidt ◽  
...  

1993 ◽  
Vol 26 (4A) ◽  
pp. A206-A209 ◽  
Author(s):  
S I Zheludeva ◽  
M V Kovalchuk ◽  
N N Novikova ◽  
A N Sosphenov
Keyword(s):  

2007 ◽  
Vol 75 (6) ◽  
Author(s):  
Ajay Gupta ◽  
Dileep Kumar ◽  
Carlo Meneghini

1992 ◽  
Vol 46 (11) ◽  
pp. 6869-6874 ◽  
Author(s):  
K. E. Miyano ◽  
T. Kendelewicz ◽  
J. C. Woicik ◽  
P. L. Cowan ◽  
C. E. Bouldin ◽  
...  

1998 ◽  
Vol 05 (01) ◽  
pp. 145-149 ◽  
Author(s):  
J. Falta ◽  
D. Bahr ◽  
G. Materlik ◽  
B. H. Müller ◽  
M. Horn-Von Hoegen

A combination of measurements of crystal truncation roda and X-ray standing waves has been used for a detailed characterization of buried Ge δ layers on Si(001). Measurements of crystal truncation rods reveal the interface roughness, the δ layer lattice constant and the δ layer concentration. From measurements with X-ray standing waves the dopant lattice position and crystallinity of the δ layer are determined. We find a linear dependence of the local tetragonal distortion of the Ge bonding in the δ layer on the Ge concentration in the layer.


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