3D multi‐level modelling of surface roughness influences on hole expansion ratios

Characteristics of 12 μm Thick Polysilicon for an Optically-Sensed Accelerometer

10.1115/imece1999-0287 ◽

1999 ◽

Author(s):

Y. H. Chen ◽

T. D. Kudrle ◽

N. C. Tien

Keyword(s):

Surface Roughness ◽

New Technology ◽

Stress Gradient ◽

Surface Micromachining ◽

Polysilicon Film ◽

Out Of Plane ◽

Polysilicon Films ◽

Polysilicon Layer ◽

Multi Level ◽

Large Capacitance

Abstract A low-stress thick polysilicon surface micromachining process has been successfully developed. An accelerometer composed of a 12μm thick polysilicon layer and an integrated photo diode on the substrate was fabricated and tested demonstrating the functionality of the process. The polysilicon film has an estimated stress of 0.6 MPa (tensile). This new technology combines some of the advantages of high-aspect-ratio bulk-micromachining such as large capacitance and high out-of-plane stiffness, with the proven advantages typically found for surface micromachining such as the formation of multi-level elements. In this paper, we first present the optimized process flow, which provides the low-stress thick polysilicon film. Then, the important characteristics of thick polysilicon films such as internal stress, stress gradient and surface roughness are discussed. Testing of the integrated photodiode was performed. Finally, the initial testing results for the accelerometer are presented to demonstrate the success of this newly developed technology.

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Modelling the surface roughness influence on the hole expansion ratio of multiphase steel

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/651/1/012006 ◽

2019 ◽

Vol 651 ◽

pp. 012006

Author(s):

S Münstermann ◽

P Wechsuwanmanee ◽

J Lian

Keyword(s):

Surface Roughness ◽

Expansion Ratio ◽

Hole Expansion ◽

Hole Expansion Ratio ◽

Multiphase Steel

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Roughness measurements of nonlinear optical polymer films by scanning tunneling microscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100152082 ◽

1989 ◽

Vol 47 ◽

pp. 22-23

Author(s):

I. H. Musselman ◽

R.-T. Chen ◽

P. E. Russell

Keyword(s):

Surface Roughness ◽

Scanning Tunneling Microscopy ◽

Nonlinear Optical ◽

Polymer Surface ◽

Light Extinction ◽

Scanning Tunneling ◽

Silicon Substrates ◽

Tunneling Microscopy ◽

Optical Polymer ◽

Total Light

Scanning tunneling microscopy (STM) has been used to characterize the surface roughness of nonlinear optical (NLO) polymers. A review of STM of polymer surfaces is included in this volume. The NLO polymers are instrumental in the development of electrooptical waveguide devices, the most fundamental of which is the modulator. The most common modulator design is the Mach Zehnder interferometer, in which the input light is split into two legs and then recombined into a common output within the two dimensional waveguide. A π phase retardation, resulting in total light extinction at the output of the interferometer, can be achieved by changing the refractive index of one leg with respect to the other using the electrooptic effect. For best device performance, it is essential that the NLO polymer exhibit minimal surface roughness in order to reduce light scattering. Scanning tunneling microscopy, with its high lateral and vertical resolution, is capable of quantifying the NLO polymer surface roughness induced by processing. Results are presented below in which STM was used to measure the surface roughness of films produced by spin-coating NLO-active polymers onto silicon substrates.

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Surface roughness measurements of vanadium-contaminated fluidized cracking catalysts by atomic force microscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100166798 ◽

1996 ◽

Vol 54 ◽

pp. 866-867

Author(s):

H. Kinney ◽

M.L. Occelli ◽

S.A.C. Gould

Keyword(s):

Surface Roughness ◽

Zeolite Y ◽

Atomic Level ◽

Microporous Structure ◽

Contact Mode ◽

Force Microscopy ◽

Atomic Force ◽

Before And After ◽

Roughness Measurements ◽

Cracking Catalysts

For this study we have used a contact mode atomic force microscope (AFM) to study to topography of fluidized cracking catalysts (FCC), before and after contamination with 5% vanadium. We selected the AFM because of its ability to well characterize the surface roughness of materials down to the atomic level. It is believed that the cracking in the FCCs occurs mainly on the catalysts top 10-15 μm suggesting that the surface corrugation could play a key role in the FCCs microactivity properties. To test this hypothesis, we chose vanadium as a contaminate because this metal is capable of irreversibly destroying the FCC crystallinity as well as it microporous structure. In addition, we wanted to examine the extent to which steaming affects the vanadium contaminated FCC. Using the AFM, we measured the surface roughness of FCCs, before and after contamination and after steaming.We obtained our FCC (GRZ-1) from Davison. The FCC is generated so that it contains and estimated 35% rare earth exchaged zeolite Y, 50% kaolin and 15% binder.

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Multi-level Issues in Organizational Behavior and Processes

10.1016/s1475-9144(2005)3 ◽

2005 ◽

Keyword(s):

Organizational Behavior ◽

Multi Level

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Verlaufsanalyse wöchentlicher Selbst- und Fremdeinschätzungen in der Langzeittherapie suchtkranker Jugendlicher

Zeitschrift für Kinder- und Jugendpsychiatrie und Psychotherapie ◽

10.1024/1422-4917/a000594 ◽

2019 ◽

Vol 47 (2) ◽

pp. 126-137

Author(s):

Ferdinand Keller ◽

Tatjana Stadnitski ◽

Jakob Nützel ◽

Renate Schepker

Keyword(s):

Allen Vier ◽

Multi Level

Zusammenfassung. Fragestellung: Über Veränderungen in der emotionalen Befindlichkeit von Jugendlichen während einer Suchttherapie ist wenig bekannt. Methode: Die Jugendlichen füllten wöchentlich einen entsprechenden Fragebogen aus, analog ihre Bezugsbetreuer eine parallelisierte Kurzfassung. Von 42 Jugendlichen liegen insgesamt 853 Bogen und von den Bezugsbetreuern 708 Bogen vor. Die Fragebogen wurden zunächst faktorenanalytisch hinsichtlich ihrer Dimensionalität ausgewertet, anschließend wurden gruppenbezogene Verlaufsanalysen (Multi-Level-Modelle) und Abhängigkeitsanalysen auf Einzelfallebene (Zeitreihenanalysen) durchgeführt. Ergebnisse: Im Jugendlichenfragebogen ergaben sich vier Faktoren: negative Befindlichkeit, Wertschätzung von Therapie/Betreuung, Motivation und Suchtdynamik. Die Übereinstimmung zwischen den Jugendlichen- und der (einfaktoriellen) Betreuereinschätzung fiel insgesamt niedrig bis mäßig aus, brachte aber auf Einzelfallebene differenziertere Ergebnisse. Im Verlauf nahmen die Werte auf allen vier Jugendlichenskalen ab. Einzig der Verlauf der Wertschätzung in der Eingewöhnungsphase war prädiktiv für den späteren Abbruch der Maßnahme: Bei den Abbrechern nahm die Wertschätzung ab, während sie bei den Beendern initial stieg. Schlussfolgerungen: Der bedeutsamste Faktor in Bezug auf die Therapiebeendigung suchtkranker Jugendlicher scheint die Wertschätzung von Therapie/Betreuung zu sein, während die Motivation jugendtypische Schwankungen aufweist. Der Suchtdynamik kam eine deutlich weniger bedeutende Rolle zu als allgemein angenommen. Programme in der Langzeittherapie sollten die Wertschätzung von Therapie/Betreuung künftig mehr fokussieren als die Suchtdynamik.

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