Piezoresistive property of an aluminum-doped zinc oxide thin film deposited via atomic-layer deposition for microelectromechanical system/nanoelectromenchanical system applications

2017 ◽  
Vol 12 ◽  
pp. S120-S124
Author(s):  
Naoki Inomata ◽  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Microelectromechanical System ◽  
Layer Deposition ◽  
Aluminum Doped Zinc Oxide

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2S) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition

Characteristics of atomic layer deposition–grown zinc oxide thin film with and without aluminum

2019 ◽  
Vol 491 ◽  
pp. 535-543 ◽  
Author(s):  
Ming-Chun Tseng ◽  
Dong-Sing Wuu ◽  
Chi-Lu Chen ◽  
Hsin-Ying Lee ◽  
Cheng-Yu Chien ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition
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