Effects of growth temperature on performance and stability of zinc oxide thin film transistors fabricated by thermal atomic layer deposition

2014 ◽  
Vol 562 ◽  
pp. 597-602 ◽  
Author(s):  
Sung Woon Cho ◽  
Cheol Hyoun Ahn ◽  
Myeong Gu Yun ◽  
So Hee Kim ◽  
Hyung Koun Cho
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Growth Temperature ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2S) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition

Characteristics of atomic layer deposition–grown zinc oxide thin film with and without aluminum

2019 ◽  
Vol 491 ◽  
pp. 535-543 ◽  
Author(s):  
Ming-Chun Tseng ◽  
Dong-Sing Wuu ◽  
Chi-Lu Chen ◽  
Hsin-Ying Lee ◽  
Cheng-Yu Chien ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document