Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.02bf04 ◽

2012 ◽

Vol 51 (2) ◽

pp. 02BF04 ◽

Author(s):

Yumi Kawamura ◽

Mai Tani ◽

Nozomu Hattori ◽

Naomasa Miyatake ◽

Masahiro Horita ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Layer Deposition

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Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.02bf04 ◽

2012 ◽

Vol 51 (2S) ◽

pp. 02BF04 ◽

Author(s):

Yumi Kawamura ◽

Mai Tani ◽

Nozomu Hattori ◽

Naomasa Miyatake ◽

Masahiro Horita ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Layer Deposition

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Low Temperature Processed Zinc Oxide Thin Film Transistors by Plasma Assisted Atomic Layer Deposition

10.7567/ssdm.2011.a-5-2 ◽

2011 ◽

Author(s):

Y. Kawamura ◽

M. Tani ◽

N. Hattori ◽

N. Miyatake ◽

M. Horita ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Layer Deposition

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Effects of growth temperature on performance and stability of zinc oxide thin film transistors fabricated by thermal atomic layer deposition

Thin Solid Films ◽

10.1016/j.tsf.2014.04.003 ◽

2014 ◽

Vol 562 ◽

pp. 597-602 ◽

Author(s):

Sung Woon Cho ◽

Cheol Hyoun Ahn ◽

Myeong Gu Yun ◽

So Hee Kim ◽

Hyung Koun Cho

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Growth Temperature ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Layer Deposition

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The Influence of Hafnium Doping on Density of States in Zinc Oxide Thin-Film Transistors Deposited via Atomic Layer Deposition

Nanoscale Research Letters ◽

10.1186/s11671-017-1852-z ◽

2017 ◽

Vol 12 (1) ◽

Author(s):

Xingwei Ding ◽

Cunping Qin ◽

Jiantao Song ◽

Jianhua Zhang ◽

Xueyin Jiang ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Density Of States ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Layer Deposition

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Interfacial Contact Effects in Top Gated Zinc Oxide Thin Film Transistors Grown by Atomic Layer Deposition

IEEE Transactions on Electron Devices ◽

10.1109/ted.2016.2586418 ◽

2016 ◽

Vol 63 (9) ◽

pp. 3540-3546 ◽

Author(s):

Alex M. Ma ◽

Mei Shen ◽

Amir Afshar ◽

Ying Y. Tsui ◽

Kenneth C. Cadien ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Layer Deposition ◽

Interfacial Contact ◽

Contact Effects

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Hybrid Passivation for Foldable Indium Gallium Zinc Oxide Thin‐Film Transistors Mediated by Low‐Temperature and Low‐Damage Parylene‐C/Atomic Layer Deposition‐AlO x Coating

physica status solidi (a) ◽

10.1002/pssa.202070040 ◽

2020 ◽

Vol 217 (12) ◽

pp. 2070040

Author(s):

Shijie Zhan ◽

Soodeok Han ◽

Sang Yun Bang ◽

Benxuan Li ◽

Young Tea Chun ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Indium Gallium Zinc Oxide ◽

Zinc Oxide Thin Film ◽

Layer Deposition ◽

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Flexible and High-Performance Amorphous Indium Zinc Oxide Thin-Film Transistor Using Low-Temperature Atomic Layer Deposition

ACS Applied Materials & Interfaces ◽

10.1021/acsami.6b11774 ◽

2016 ◽

Vol 8 (49) ◽

pp. 33821-33828 ◽

Author(s):

Jiazhen Sheng ◽

Hwan-Jae Lee ◽

Saeroonter Oh ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Indium Zinc Oxide ◽

Layer Deposition

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Hybrid Passivation for Foldable Indium Gallium Zinc Oxide Thin‐Film Transistors Mediated by Low‐Temperature and Low‐Damage Parylene‐C/Atomic Layer Deposition‐AlO x Coating

physica status solidi (a) ◽

10.1002/pssa.201900832 ◽

2019 ◽

Vol 217 (12) ◽

pp. 1900832 ◽

Author(s):

Shijie Zhan ◽

Soodeok Han ◽

Sang Yun Bang ◽

Benxuan Li ◽

Young Tea Chun ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Thin Film ◽

Indium Gallium Zinc Oxide ◽

Zinc Oxide Thin Film ◽

Layer Deposition ◽

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Piezoresistive property of an aluminum-doped zinc oxide thin film deposited via atomic-layer deposition for microelectromechanical system/nanoelectromenchanical system applications

IEEJ Transactions on Electrical and Electronic Engineering ◽

10.1002/tee.22570 ◽

2017 ◽

Vol 12 ◽

pp. S120-S124

Author(s):

Naoki Inomata ◽

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Microelectromechanical System ◽

Layer Deposition ◽

Aluminum Doped Zinc Oxide

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Erratum to: The Influence of Hafnium Doping on Density-of-States in Zinc Oxide Thin-Film Fransistors Deposited Via Atomic Layer Deposition

Nanoscale Research Letters ◽

10.1186/s11671-017-1927-x ◽

2017 ◽

Vol 12 (1) ◽

Author(s):

Xingwei Ding ◽

Cunping Qin ◽

Jiantao Song ◽

Jianhua Zhang ◽

Xueyin Jiang ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Density Of States ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Layer Deposition

Download Full-text